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1. (WO1998048608) MICROBELLOWS ACTUATOR
Latest bibliographic data on file with the International Bureau

Pub. No.: WO/1998/048608 International Application No.: PCT/US1998/007424
Publication Date: 05.11.1998 International Filing Date: 09.04.1998
Chapter 2 Demand Filed: 12.11.1998
IPC:
H01L 21/00 (2006.01) ,H01L 29/82 (2006.01)
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21
Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
29
Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having at least one potential-jump barrier or surface barrier; Capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof
66
Types of semiconductor device
82
controllable by variation of the magnetic field applied to the device
Applicants:
CALIFORNIA INSTITUTE OF TECHNOLOGY [US/US]; 1201 East California Boulevard Pasadena, CA 91125, US
Inventors:
TAI, Yu-Chong; US
YANG, Xing; US
Agent:
HARRIS, Scott, C.; Fish & Richardson P.C. Suite 1400 4225 Executive Square La Jolla, CA 92037, US
Priority Data:
09/057,38108.04.1998US
60/043,46311.04.1997US
Title (EN) MICROBELLOWS ACTUATOR
(FR) ACTIONNEUR A MICRO-SOUFFLETS
Abstract:
(EN) A micromachined multi-layered microbellows-style actuator capable of delivering larger deflections. Anchor structures (420, 430, 440, 450) are disclosed that improve the strength of the microbellows membrane (150). Thermopneumatic actuators having a resistive heater chip are also disclosed.
(FR) L'invention concerne un actionneur multicouche micro-usiné, du type à micro-soufflets, capable de produire des réflexions plus importantes qu'une membrane plate monocouche de taille comparable. Des structures d'ancrage augmentant la résistance de la membrane à micro-soufflets sont décrites. Un appareil de caractérisation est utilisé pour la mesure de la qualité de la membrane à micro-soufflets. Des actionneurs thermopneumatiques ayant une puce de chauffage résistif sont également décrits.
Designated States: AL, AM, AT, AU, AZ, BA, BB, BG, BR, BY, CA, CH, CN, CU, CZ, DE, DK, EE, ES, FI, GB, GE, GH, GM, GW, HU, ID, IL, IS, JP, KE, KG, KP, KR, KZ, LC, LK, LR, LS, LT, LU, LV, MD, MG, MK, MN, MW, MX, NO, NZ, PL, PT, RO, RU, SD, SE, SG, SI, SK, SL, TJ, TM, TR, TT, UA, UG, UZ, VN, YU, ZW
African Regional Intellectual Property Organization (ARIPO) (GH, GM, KE, LS, MW, SD, SZ, UG, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, CH, CY, DE, DK, ES, FI, FR, GB, GR, IE, IT, LU, MC, NL, PT, SE)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)
Also published as:
EP1018145AU1998069692