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1. WO1998037602 - METHOD AND APPARATUS FOR ELIMINATING REFLECTED ENERGY DUE TO STAGE MISMATCH IN NONLINEAR MAGNETIC COMPRESSION MODULES

Publication Number WO/1998/037602
Publication Date 27.08.1998
International Application No. PCT/US1998/002941
International Filing Date 17.02.1998
Chapter 2 Demand Filed 09.09.1998
IPC
H01S 3/0971 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
3Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
09Processes or apparatus for excitation, e.g. pumping
097by gas discharge of a gas laser
0971transversely excited
H01S 5/042 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
5Semiconductor lasers
04Processes or apparatus for excitation, e.g. pumping
042Electrical excitation
H03K 3/57 2006.01
HELECTRICITY
03BASIC ELECTRONIC CIRCUITRY
KPULSE TECHNIQUE
3Circuits for generating electric pulses; Monostable, bistable or multistable circuits
02Generators characterised by the type of circuit or by the means used for producing pulses
53by the use of an energy-accumulating element discharged through the load by a switching device controlled by an external signal and not incorporating positive feedback
57the switching device being a semiconductor device
H03K 17/80 2006.01
HELECTRICITY
03BASIC ELECTRONIC CIRCUITRY
KPULSE TECHNIQUE
17Electronic switching or gating, i.e. not by contact-making and -breaking
51characterised by the use of specified components
80by the use, as active elements, of non-linear magnetic or dielectric devices
CPC
H01S 3/0971
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
3Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
09Processes or apparatus for excitation, e.g. pumping
097by gas discharge of a gas laser
0971transversely excited
H01S 5/0428
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
5Semiconductor lasers
04Processes or apparatus for excitation, e.g. pumping, ; e.g. by electron beams
042Electrical excitation ; ; Circuits therefor
0428for applying pulses to the laser
H03K 17/80
HELECTRICITY
03BASIC ELECTRONIC CIRCUITRY
KPULSE TECHNIQUE
17Electronic switching or gating, i.e. not by contact-making and –breaking
51characterised by the components used
80using non-linear magnetic devices; using non-linear dielectric devices
H03K 3/57
HELECTRICITY
03BASIC ELECTRONIC CIRCUITRY
KPULSE TECHNIQUE
3Circuits for generating electric pulses; Monostable, bistable or multistable circuits
02Generators characterised by the type of circuit or by the means used for producing pulses
53by the use of an energy-accumulating element discharged through the load by a switching device controlled by an external signal and not incorporating positive feedback
57the switching device being a semiconductor device
Applicants
  • CYMER, INC. [US]/[US] (AllExceptUS)
  • PARTLO, William, N. [US]/[US] (UsOnly)
  • SANDSTROM, Richard, L. [US]/[US] (UsOnly)
  • BIRX, Daniel, L. [US]/[US] (UsOnly)
  • NESS, Richard, Mons [US]/[US] (UsOnly)
Inventors
  • PARTLO, William, N.
  • SANDSTROM, Richard, L.
  • BIRX, Daniel, L.
  • NESS, Richard, Mons
Agents
  • ROSS, John, R.
Priority Data
08/803,89021.02.1997US
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) METHOD AND APPARATUS FOR ELIMINATING REFLECTED ENERGY DUE TO STAGE MISMATCH IN NONLINEAR MAGNETIC COMPRESSION MODULES
(FR) PROCEDE ET APPAREIL POUR SUPPRIMER L'ENERGIE REFLECHIE DUE AU DEFAUT D'ADAPTATION ENTRE ETAGES DANS DES MODULES DE COMPRESSION MAGNETIQUES NON LINEAIRES
Abstract
(EN)
A high voltage pulse power generating circuit capable of eliminating secondary pulses due to stage mismatch in the stages of its magnetic pulse compressor circuit is disclosed. The pulse generating circuit source comprises a high voltage charge storing element (CO) which is periodically discharged into a nonlinear magnetic compressor circuit (16). A mismatch correction circuit (CRn) coupled to each stage of the compressor circuit discharges the reflected energy due to stage mismatch and thus eliminates the reflected energy from being launched back into the load. In a preferred embodiment, the pulse power generating circuit of the present invention utilizes a diode and a resistor that is coupled to each stage of the magnetic pulse compressor circuit (16).
(FR)
Cette invention se rapporte à un circuit générateur d'énergie pulsée haute tension, susceptible de supprimer les impulsions secondaires résultant du défaut d'adaptation entre les étages de son circuit compresseur d'impulsions magnétiques. La source du circuit générateur d'impulsions comporte un élément condensateur (CO) haute tension qui se décharge périodiquement dans un circuit compresseur magnétique (16) non linéaire. Un circuit de correction du défaut d'adaptation (CRn), couplé à chaque étage du circuit compresseur, décharge l'énergie réfléchie résultant du défaut d'adaptation et supprime de ce fait la réinjection de l'énergie réfléchie dans la charge. Dans une réalisation préférée, le circuit générateur d'énergie pulsée met en oeuvre une diode et une résistance couplée à chaque étage du circuit compresseur d'impulsions magnétiques (16).
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