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1. WO1998036444 - DEVICE FOR PROCESSING SEMICONDUCTOR WAFERS

Publication Number WO/1998/036444
Publication Date 20.08.1998
International Application No. PCT/NL1998/000055
International Filing Date 27.01.1998
Chapter 2 Demand Filed 27.08.1998
IPC
H01L 21/677 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
677for conveying, e.g. between different work stations
CPC
H01L 21/67781
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; ; Apparatus not specifically provided for elsewhere
677for conveying, e.g. between different workstations
67763the wafers being stored in a carrier, involving loading and unloading
67778involving loading and unloading of waers
67781Batch transfer of wafers
Y10S 414/135
YSECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
10TECHNICAL SUBJECTS COVERED BY FORMER USPC
STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
414Material or article handling
135Associated with semiconductor wafer handling
Applicants
  • ASM INTERNATIONAL N.V. [NL]/[NL] (AllExceptUS)
  • GRANNEMAN, Ernst, Hendrik, August [NL]/[NL] (UsOnly)
  • HASPER, Albert [NL]/[NL] (UsOnly)
  • ZINGER, Jan [NL]/[NL] (UsOnly)
Inventors
  • GRANNEMAN, Ernst, Hendrik, August
  • HASPER, Albert
  • ZINGER, Jan
Agents
  • DE BRUIJN, Leendert, C.
Priority Data
100510227.01.1997NL
Publication Language English (EN)
Filing Language Dutch (NL)
Designated States
Title
(EN) DEVICE FOR PROCESSING SEMICONDUCTOR WAFERS
(FR) DISPOSITIFS POUR LE TRAITEMENT DE PLAQUETTES EN SEMI-CONDUCTEUR
Abstract
(EN)
Device for processing semiconductor wafers, comprising at least one processing chamber which is completely closed with the exception of a connection to a distributing system. In said at least one processing chamber there are situated preferably two reactors and a common feed/removal system in order to be able to subject wafers, which may optionally be arranged in boats, to an identical processing operation.
(FR)
Dispositif pour le traitement de plaquettes en semi-conducteur, comprenant au moins une chambre de traitement qui est complètement fermée à l'exception d'une liaison à un système de distribution. Dans la ou lesdites chambre(s) de traitement, sont placés de préférence deux réacteurs et un système d'alimentation/retrait permettant de soumettre les plaquettes, qui peuvent éventuellement être placées dans des nacelles, à une opération de traitement identique.
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