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1. WO1998023917 - SPEED OF ROTATION SENSOR

Publication Number WO/1998/023917
Publication Date 04.06.1998
International Application No. PCT/DE1997/002671
International Filing Date 14.11.1997
Chapter 2 Demand Filed 22.04.1998
IPC
G01C 9/04 2006.1
GPHYSICS
01MEASURING; TESTING
CMEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
9Measuring inclination, e.g. by clinometers, by levels
02Details
04Transmission means between sensing element and final indicator for giving an enlarged reading
G01C 19/56 2012.1
GPHYSICS
01MEASURING; TESTING
CMEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
19Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
56Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
CPC
G01C 19/56
GPHYSICS
01MEASURING; TESTING
CMEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
19Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
56Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
G01C 19/5712
GPHYSICS
01MEASURING; TESTING
CMEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
19Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
56Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
5705using masses driven in reciprocating rotary motion about an axis
5712the devices involving a micromechanical structure
Applicants
  • SIEMENS AKTIENGESELLSCHAFT [DE]/[DE] (AllExceptUS)
  • KAPELS, Hergen [DE]/[DE] (UsOnly)
  • HIEROLD, Christofer [DE]/[DE] (UsOnly)
  • STEGER, Max [IT]/[DE] (UsOnly)
  • SCHEITER, Thomas [DE]/[DE] (UsOnly)
  • NOE, Reinhold [AT]/[DE] (UsOnly)
  • NÄHER, Ulrich [DE]/[DE] (UsOnly)
Inventors
  • KAPELS, Hergen
  • HIEROLD, Christofer
  • STEGER, Max
  • SCHEITER, Thomas
  • NOE, Reinhold
  • NÄHER, Ulrich
Priority Data
196 48 425.122.11.1996DE
Publication Language German (de)
Filing Language German (DE)
Designated States
Title
(DE) DREHRATENSENSOR
(EN) SPEED OF ROTATION SENSOR
(FR) CAPTEUR DE VITESSE DE ROTATION
Abstract
(DE) Drehratensensor als mikromechanisches Bauelement in Silizium, bei dem ein Ring (1) mit einer starren Strebe (11) längs eines Durchmessers an elastischen Verstrebungen (10) und Verankerungen (9) so auf einem Substrat aufgehängt ist, daß er Drehschwingungen um seine Mittenachse ausführen kann und bei Einwirkung äußerer Drehmomente um die Strebe verkippt werden kann. Es sind an dem Ring und an dem Substrat Elektroden vorhanden, an die elektrische Spannungen derart angelegt werden können, daß Drehschwingungen des Ringes um seine Mittenachse angeregt werden können und Drehschwingungen um die Strebe detektiert werden können. Zur Stabilisierung der Lage des Ringes in der Ruhelage können weiter Elektroden am Ring und am Substrat zur Erzeugung elektrostatischer Kräfte vorgesehen sein.
(EN) A speed of rotation sensor is a micromechanical silicon component. A ring (1) with a stiff strut (11) is suspended by elastic braces (10) and anchors (9) on a substrate in such a way that it can oscillate around its central axis and be tilted around the strut when outer torques are applied. Electric voltages can be applied to electrodes located on the ring and substrate to make the ring oscillate around its central axis and to detect oscillations around the strut. Additional electrodes may be provided on the ring and substrate to generate electrostatic forces and hence to stabilise the ring in its rest position.
(FR) Ce capteur de vitesses de rotation est un composant micromécanique en silicium. Un anneau (1) avec une entretoise rigide (11) est accroché le long de son diamètre à des contrefiches (10) et ancrages élastiques (9) sur un substrat de sorte qu'il puisse osciller autour de son axe médian et pivoter autour de l'entretoise sous l'effet de couples extérieurs. On peut appliquer des tensions électriques à des électrodes montées sur l'anneau et sur le substrat afin d'amener l'anneau à osciller autour de son axe médian et de détecter des oscillations autour de l'entretoise. Des électrodes supplémentaires peuvent être montées sur l'anneau et sur le substrat afin de générer des forces électrostatiques et de stabiliser ainsi l'anneau dans sa position de repos.
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