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1. WO1998014832 - BOTTOM ANTIREFLECTIVE COATINGS CONTAINING AN ARYLHYDRAZO DYE

Publication Number WO/1998/014832
Publication Date 09.04.1998
International Application No. PCT/EP1997/005279
International Filing Date 26.09.1997
Chapter 2 Demand Filed 21.04.1998
IPC
G03F 7/09 2006.01
GPHYSICS
03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
7Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
004Photosensitive materials
09characterised by structural details, e.g. supports, auxiliary layers
CPC
G03F 7/091
GPHYSICS
03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR;
7Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
004Photosensitive materials
09characterised by structural details, e.g. supports, auxiliary layers
091characterised by antireflection means or light filtering or absorbing means, e.g. anti-halation, contrast enhancement
Applicants
  • CLARIANT INTERNATIONAL LTD. [CH]/[CH]
Inventors
  • DING, Shuji
  • CORSO, Anthony, J.
  • KHANNA, Dinesh, N.
  • HANNIGAN, Timothy, T.
  • EBERLY, Daniel, E.
  • LU, Ping-Hung
Agents
  • HÜTTER, Klaus
Priority Data
08/724,12630.09.1996US
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) BOTTOM ANTIREFLECTIVE COATINGS CONTAINING AN ARYLHYDRAZO DYE
(FR) REVETEMENTS DE FOND ANTIREFLECHISSANTS CONTENANT UN COLORANT ARYLHYDRAZO
Abstract
(EN)
The present invention relates to a novel antireflective coating solution and a process for its use in photolithography. The antireflective coating solution comprises a polymer, a novel arylhydrazo dye and a solvent, where the novel arylhydrazo dye absorbs radiation from about 180 nm to about 450 nm.
(FR)
La présente invention concerne une nouvelle solution de revêtement antiréfléchissant et un procédé pour utiliser cette solution en photolitographie. La solution de revêtement antiréfléchissant comprend un polymère, un nouveau colorant arylhydrazo et un solvant. Ce nouveau colorant arylhydrazo absorbe les rayonnements entre 180 nm et 450 nm approximativement.
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