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1. (WO1998014823) ACTIVE-MATRIX LCD AND THE LIKE, AND THEIR MANUFACTURE

Pub. No.:    WO/1998/014823    International Application No.:    PCT/IB1997/001131
Publication Date: Apr 9, 1998 International Filing Date: Sep 19, 1997
IPC: G02F 1/1365
G02F 1/1368
H01L 45/00
Applicants: PHILIPS ELECTRONICS N.V.
PHILIPS NORDEN AB
Inventors: OVERSLUIZEN, Gerrit
GEUNS, Thomas, Cleophas, Theodorus
McGARVEY, Brian, Patrick
DEANE, Steven, Charles
Title: ACTIVE-MATRIX LCD AND THE LIKE, AND THEIR MANUFACTURE
Abstract:
Thin-film switching elements (20, 21) of a display device or the like include a first electrode (22, 23) on a substrate (11) and a layer of switching material (24, 25) on the first electrode. These switching elements may be semiconductor pin or Schottky diodes, or MIMs, or TFTs. The switching material is typically α-Si:H in the case of the semiconductor diodes and TFTs, and tantalum oxide or silicon nitride in the case of the MIMs. An auxiliary layer (28, 29) of insulating material is provided between the first electrode (22, 23) and the layer of switching material (24, 25), leaving an edge (30, 31) of the first electrode uncovered, so that the layer of switching material is connected to this edge only. The switching elements with this construction can be patterned using an inexpensive proximity printer, and have a low capacitance value, so counter-acting kickback and crosstalk which can occur in a switching matrix, e.g. in the display of television pictures.