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1. (WO1997039308) WAVELET ANALYSIS FOR LASER ULTRASONIC MEASUREMENT OF MATERIAL PROPERTIES
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/1997/039308    International Application No.:    PCT/US1997/005982
Publication Date: 23.10.1997 International Filing Date: 10.04.1997
IPC:
G01N 29/12 (2006.01), G01N 29/24 (2006.01), G01N 29/50 (2006.01), G01N 29/52 (2006.01)
Applicants: TEXTRON SYSTEMS CORPORATION [US/US]; 201 Lowell Street, Wilmington, MA 01887 (US)
Inventors: KOTIDIS, Petros, A.; (US).
REICH, Judith; (US)
Agent: GREEN, Clarence, A.; Perman & Green, 425 Post Road, Fairfield, CT 06430 (US)
Priority Data:
08/634,286 18.04.1996 US
Title (EN) WAVELET ANALYSIS FOR LASER ULTRASONIC MEASUREMENT OF MATERIAL PROPERTIES
(FR) ANALYSE PAR ONDELETTES POUR MESURER PAR ULTRASONS LASER LES PROPRIETES DE MATERIAUX
Abstract: front page image
(EN)A laser ultrasonics technique (18) is used to characterize a composite dispersive response signal from a sample under analysis, such as a semiconductor wafer (16). Rather than measuring individual accoustic wave velocities at specific frequencies, an entire dispersive response signal (fig. 8) is analyzed. In a presently preferred embodiment of this invention the entire dispersive response signal is analyzed using a wavelet-based technique (figs. 4a, 4b), such as dispersive wavelet transform analysis technique.
(FR)Une technique d'ultrasons laser (18) est utilisée pour caractériser un signal de réponse dispersif composite provenant d'un échantillon à analyser, tel qu'une plaquette à semi-conducteurs (16). Plutôt que mesurer les vitesses des différentes ondes acoustiques à des fréquences spécifiques, on analyse un signal de réponse dispersif entier (fig. 8). Dans le mode de réalisation actuellement préféré, la totalité du signal de réponse dispersif est analysée par une technique à base d'ondelettes (fig. 4a, 4b), telle qu'une technique d'analyse par transformation d'ondelettes dispersives.
Designated States: AL, AM, AT, AU, AZ, BA, BB, BG, BR, BY, CA, CH, CN, CU, CZ, DE, DK, EE, ES, FI, GB, GE, GH, HU, IL, IS, JP, KE, KG, KP, KR, KZ, LC, LK, LR, LS, LT, LU, LV, MD, MG, MK, MN, MW, MX, NO, NZ, PL, PT, RO, RU, SD, SE, SG, SI, SK, TJ, TM, TR, TT, UA, UG, UZ, VN, YU.
African Regional Intellectual Property Organization (GH, KE, LS, MW, SD, SZ, UG)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, CH, DE, DK, ES, FI, FR, GB, GR, IE, IT, LU, MC, NL, PT, SE)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)