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Machine translation
1. (WO1997037381) INSTRUMENT AND MOUNTING EQUIPMENT USED IN CLEAN ROOM
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/1997/037381    International Application No.:    PCT/JP1997/001039
Publication Date: 09.10.1997 International Filing Date: 27.03.1997
Chapter 2 Demand Filed:    21.10.1997    
IPC:
H01L 21/67 (2006.01), H01L 21/673 (2006.01), H01L 21/677 (2006.01)
Applicants: TOKYO ELECTRON LIMITED [JP/JP]; 3-6, Akasaka 5-chome, Minato-ku, Tokyo 107 (JP) (For All Designated States Except US).
TAISEI CORPORATION [JP/JP]; 25-1, Nishi-Shinjuku 1-chome, Shinjuku-ku, Tokyo 163 (JP) (For All Designated States Except US).
SAITO, Misako [JP/JP]; (JP) (For US Only).
MATSUO, Takenobu [JP/JP]; (JP) (For US Only).
WAKABAYASHI, Tsuyoshi [JP/JP]; (JP) (For US Only).
KOBAYASHI, Sadao [JP/JP]; (JP) (For US Only).
WAKAYAMA, Yoshihide [JP/JP]; (JP) (For US Only).
IMAFUKU, Masayuki [JP/JP]; (JP) (For US Only)
Inventors: SAITO, Misako; (JP).
MATSUO, Takenobu; (JP).
WAKABAYASHI, Tsuyoshi; (JP).
KOBAYASHI, Sadao; (JP).
WAKAYAMA, Yoshihide; (JP).
IMAFUKU, Masayuki; (JP)
Agent: SUZUYE, Takehiko; Suzuye & Suzuye, 7-2, Kasumigaseki 3-chome, Chiyoda-ku, Tokyo 100 (JP)
Priority Data:
8/77558 29.03.1996 JP
8/77559 29.03.1996 JP
Title (EN) INSTRUMENT AND MOUNTING EQUIPMENT USED IN CLEAN ROOM
(FR) INSTRUMENT UTILISE DANS UNE SALLE BLANCHE ET EQUIPEMENT DE MONTAGE
Abstract: front page image
(EN)An instrument which is used for handling substrates in a clean room maintained at a room temperature under the atmospheric pressure and contains a resin basic material and at least one additive selected from among a group composed of a lubricant, plasticizer, an antioxidant and an antistatic agent. The additive does not generate any gaseous organic component under the conditions of a room temperature and the atmospheric pressure.
(FR)Instrument utilisé pour la manipulation de substrats dans une sale blanche maintenue à température ambiante et sous pression atmosphérique et contenant un matériau de base en résine, ainsi qu'au moins un additif sélectionné dans un groupe composé d'un lubrifiant, d'un plastifiant, d'un antioxydant et d'un agent antistatique. Cet additif ne génère aucun constituant organique gazeux dans des conditions de température ambiante et de pression atmosphérique.
Designated States: JP, KR, SG, US.
European Patent Office (AT, BE, CH, DE, DK, ES, FI, FR, GB, GR, IE, IT, LU, MC, NL, PT, SE).
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)