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Machine translation
1. (WO1997037057) DEPOSITION METHOD AND PRECURSOR THEREFOR
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/1997/037057    International Application No.:    PCT/IB1996/000262
Publication Date: 09.10.1997 International Filing Date: 29.03.1996
Chapter 2 Demand Filed:    30.09.1997    
IPC:
C23C 16/18 (2006.01)
Applicants: INTERNATIONAL BUSINESS MACHINES CORPORATION [US/US]; Old Orchard Road, Armonk, NY 10504 (US) (For All Designated States Except US).
ARROUY, Frédéric [FR/FR]; (FR) (For US Only).
BEDNORZ, Johannes, Georg [DE/CH]; (CH) (For US Only).
BERKE, Heinz [DE/CH]; (CH).
FRITSCH, Elke [DE/DE]; (DE) (For US Only).
HUBER, J., Robert [CH/CH]; (CH).
LOCQUET, Jean-Pierre [BE/CH]; (CH) (For US Only).
MAECHLER, Erich [CH/CH]; (CH) (For US Only)
Inventors: ARROUY, Frédéric; (FR).
BEDNORZ, Johannes, Georg; (CH).
BERKE, Heinz; (CH).
FRITSCH, Elke; (DE).
HUBER, J., Robert; (CH).
LOCQUET, Jean-Pierre; (CH).
MAECHLER, Erich; (CH)
Agent: KLETT, Peter, Michael; International Business Machines Corporation, Säumerstrasse 4, CH-8803 Rüschlikon (CH)
Priority Data:
Title (EN) DEPOSITION METHOD AND PRECURSOR THEREFOR
(FR) PROCEDE DE DEPOT ET PRECURSEUR AD HOC
Abstract: front page image
(EN)The invention relates to use of a molecule with at least one metal atom and a porphyrine-derived ligand as precursor material for decomposition. It further relates to a non-thermal decomposition method with a decomposition means.
(FR)La présente invention concerne l'utilisation d'une molécule comportant au moins un atome de métal et d'un ligand dérivé de la porphyrine comme matériau précurseur de décomposition. L'invention concerne également un procédé non thermique de décomposition ayant recours à un moyen de décomposition.
Designated States: JP, US.
European Patent Office (AT, BE, CH, DE, DK, ES, FI, FR, GB, GR, IE, IT, LU, MC, NL, PT, SE).
Publication Language: English (EN)
Filing Language: English (EN)