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1. WO1997026641 - PLASMA ADDRESSED LIQUID CRYSTAL DISPLAY WITH ETCHED GLASS SPACERS

Publication Number WO/1997/026641
Publication Date 24.07.1997
International Application No. PCT/IB1996/001424
International Filing Date 12.12.1996
IPC
G02F 1/133 2006.01
GPHYSICS
02OPTICS
FDEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH IS MODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THE DEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY, COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g. SWITCHING, GATING, MODULATING OR DEMODULATING; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
1Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
01for the control of the intensity, phase, polarisation or colour
13based on liquid crystals, e.g. single liquid crystal display cells
133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
CPC
G02F 1/13334
GPHYSICS
02OPTICS
FDEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH IS MODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THE DEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY, COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g. SWITCHING, GATING, MODULATING OR DEMODULATING; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
1Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
01for the control of the intensity, phase, polarisation or colour 
13based on liquid crystals, e.g. single liquid crystal display cells
133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
1333Constructional arrangements; ; Manufacturing methods
13334Plasma addressed liquid crystal cells [PALC]
Applicants
  • PHILIPS ELECTRONICS N.V. [NL]/[NL]
  • PHILIPS NORDEN AB [SE]/[SE] (SE)
Inventors
  • KHAN, Babar, Ali
  • VAN HELLEPUTTE, Henri, R., J., R.
  • BURGMANS, Adrianus, L., J.
  • KUIJK, Karel, Elbert
  • BONGAERTS, Petrus, F., G.
  • BRUININK, Jacob
Agents
  • RAAP, Adriaan, Y.
Priority Data
08/588,79919.01.1996US
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) PLASMA ADDRESSED LIQUID CRYSTAL DISPLAY WITH ETCHED GLASS SPACERS
(FR) AFFICHEUR A CRISTAUX LIQUIDES ADRESSABLE PAR PLASMA, AVEC PLAQUES D'ESPACEMENT EN VERRE GRAVEES
Abstract
(EN)
A flat display device, preferably of the PALC type, in which the plasma channels are formed by etching laterally-spaced slots in a spacer plate, attaching a thin dielectric sheet over the etched spacer plate, and bonding the etched spacer plate to a transparent substrate such that each channel is formed by the portion of the substrate between flanking walls formed by the etched slots in the spacer plate, adjacent flanking walls in the spacer plate, and the overlying portion of the thin dielectric sheet. By positioning the flnking walls between channel electrode pairs, thus providing glass-to-glass interfaces, anodic bonding can be employed to assemble the three channel elements. Etching can be simplified by pre-attaching the unetched channel plate to the substrate or thin dielectric cover sheet with an intervening etch stop, and etching $i(in situ) using the etch stop to prevent etching of the substrate or thin dielectric cover sheet. In a modification, the thin dielectric cover sheet as a separate element is substituted by depositing a continuous layer or multi-layers including an etch stop on the unetched spacer plate so that, following the etching, the deposited layer or multi-layer remains as the thin channel cover.
(FR)
Pour former les canaux à plasma d'un écran plat, de préférence de type PALC, on grave des fentes espacées latéralement dans une plaque d'espacement, on fixe une feuille diélectrique mince sur la plaque gravée et on la relie à un substrat transparent, de façon que chaque canal soit constitué par la partie du substrat située entre les parois adjacentes formées par les fentes gravées dans la plaque d'espacement, les parois adjacentes de la plaque et la partie recouvrante de la feuille diélectrique. En positionnant les parois adjacentes entre les paires d'électrodes de canal, donc en créant des interfaces verre/verre, on peut utiliser la liaison anodique pour assembler les trois éléments de canal. On peut simplifier la gravure en pré-fixant la plaque à canal non gravée sur le substrat ou sur la feuille de protection diélectrique à l'aide d'une couche d'arrêt d'attaque intermédiaire et en réalisant la gravure $i(in situ), la couche d'arrêt d'attaque étant utilisée pour éviter de graver le substrat ou la feuille diélectrique. Dans une variante, à la place de la feuille de protection diélectrique mince en tant qu'élément distinct, on dépose une couche continue ou plusieurs couches comprenant une couche d'arrêt d'attaque sur la plaque d'espacement non gravée, de façon qu'après la gravure, la ou les couches déposées subsistent pour constituer la protection mince du canal.
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