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1. WO1997025837 - DEVICE FOR THE PRODUCTION OF PLASMAS BY MICROWAVES

Publication Number WO/1997/025837
Publication Date 17.07.1997
International Application No. PCT/EP1996/005821
International Filing Date 23.12.1996
Chapter 2 Demand Filed 20.06.1997
IPC
H01J 37/32 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
32Gas-filled discharge tubes
H05H 1/46 2006.01
HELECTRICITY
05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
HPLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY- CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
1Generating plasma; Handling plasma
24Generating plasma
46using applied electromagnetic fields, e.g. high frequency or microwave energy
CPC
H01J 37/32192
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
32Gas-filled discharge tubes, ; e.g. for surface treatment of objects such as coating, plating, etching, sterilising or bringing about chemical reactions
32009Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
32192Microwave generated discharge
H01J 37/32229
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
32Gas-filled discharge tubes, ; e.g. for surface treatment of objects such as coating, plating, etching, sterilising or bringing about chemical reactions
32009Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
32192Microwave generated discharge
32211Means for coupling power to the plasma
32229Waveguides
H01J 37/32247
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
32Gas-filled discharge tubes, ; e.g. for surface treatment of objects such as coating, plating, etching, sterilising or bringing about chemical reactions
32009Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
32192Microwave generated discharge
32211Means for coupling power to the plasma
32247Resonators
H05H 1/46
HELECTRICITY
05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
HPLASMA TECHNIQUE
1Generating plasma; Handling plasma
24Generating plasma
46using applied electromagnetic fields, e.g. high frequency or microwave energy
Applicants
  • SPITZL, Ralf [DE]/[DE]
  • ASCHERMANN, Benedikt [DE]/[DE] (UsOnly)
Inventors
  • SPITZL, Ralf
  • ASCHERMANN, Benedikt
Agents
  • FLACCUS, Rolf-Dieter
Priority Data
196 00 223.005.01.1996DE
Publication Language German (DE)
Filing Language German (DE)
Designated States
Title
(DE) VORRICHTUNG ZUR ERZEUGUNG VON PLASMEN MITTELS MIKROWELLEN
(EN) DEVICE FOR THE PRODUCTION OF PLASMAS BY MICROWAVES
(FR) DISPOSITIF POUR PRODUIRE DES PLASMAS PAR HYPERFREQUENCE
Abstract
(DE)
Eine Vorrichtung zur Erzeugung von Mikrowellenplasmen mit einem Mikrowellenerzeuger (1) und dessen Ankopplung an einen Hohlleiterresonator (5), der eine Plasmakammer (7) umfaßt, wird vorgeschlagen, worin die kurze Seite des Querschnitts des Resonators (5) parallel der Achsez zugewandt in der gemeinsamen Wand mit der Kammer (7) liegt und die Mikrowellenleistung aus dem Resonator (5) über Koppelstellen (6) in dieser kurzen Querschnittsseite in die Kammer (7) eingekoppelt wird. Die Koppelstellen sind bevorzugt als azimutale Schlitzkoppler in der gemeinsamen Wand von 5 und 7 ausgeführt.
(EN)
The invention relates to a device for the production of microwave plasmas with a microwave generator (1) and a wave guide resonator (5) which comprises a plasma chamber (7). The short side of the cross-section of the resonator (5) is turned to be parallel to the axis y and is in a common wall with the chamber (7). The microwave power from the resonator (5) is coupled into the chamber (7) at coupling points (6) in said short cross section side. The coupling points are preferably in the form of azimuthal slot couplers in the common wall of (5) and (7).
(FR)
Dispositif pour produire des plasmas par hyperfréquence au moyen d'un générateur d'hyperfréquence (1) et de son accouplement à un résonateur à guide d'ondes (5) comprenant une chambre à plasma (7). Le petit côté de la section du résonateur (5) est situé dans la paroi commune avec la chambre (7), et orienté de façon parallèle à l'axe z. La puissance hyperfréquence provenant du résonateur (5) est couplée dans la chambre (7), par l'intermédiaire de points de couplage (6) situés dans ce petit côté de la section. Les points de couplage se présentent de préférence sous forme de coupleurs à fente azimutaux dans la paroi commune à (5) et (7).
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