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1. (WO1997019509) PLATEN FOR USE WITH STAGES AND METHOD OF MAKING SAME
Latest bibliographic data on file with the International Bureau

Pub. No.: WO/1997/019509 International Application No.: PCT/US1996/018256
Publication Date: 29.05.1997 International Filing Date: 15.11.1996
Chapter 2 Demand Filed: 16.05.1997
IPC:
G03F 7/20 (2006.01) ,H02K 1/02 (2006.01) ,H02K 1/06 (2006.01) ,H02K 15/02 (2006.01) ,H02K 41/03 (2006.01)
G PHYSICS
03
PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
F
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
7
Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
20
Exposure; Apparatus therefor
H ELECTRICITY
02
GENERATION, CONVERSION, OR DISTRIBUTION OF ELECTRIC POWER
K
DYNAMO-ELECTRIC MACHINES
1
Details of the magnetic circuit
02
characterised by the magnetic material
H ELECTRICITY
02
GENERATION, CONVERSION, OR DISTRIBUTION OF ELECTRIC POWER
K
DYNAMO-ELECTRIC MACHINES
1
Details of the magnetic circuit
06
characterised by the shape, form, or construction
H ELECTRICITY
02
GENERATION, CONVERSION, OR DISTRIBUTION OF ELECTRIC POWER
K
DYNAMO-ELECTRIC MACHINES
15
Methods or apparatus specially adapted for manufacturing, assembling, maintaining or repairing dynamo-electric machines
02
of stator or rotor bodies
H ELECTRICITY
02
GENERATION, CONVERSION, OR DISTRIBUTION OF ELECTRIC POWER
K
DYNAMO-ELECTRIC MACHINES
41
Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
02
Linear motors; Sectional motors
03
Synchronous motors; Motors moving step by step; Reluctance motors
Applicants:
MRS TECHNOLOGY, INC. [US/US]; 10 Elizabeth Drive Chelmsford, MA 01824, US
Inventors:
SIMPSON, Craig, R.; US
Agent:
SMITH, James, M. ; Hamilton, Brook, Smith & Reynolds Two Militia Drive Lexington, MA 02173, US
Priority Data:
08/560,39317.11.1995US
Title (EN) PLATEN FOR USE WITH STAGES AND METHOD OF MAKING SAME
(FR) PLATINE POUR PLAQUES D'IMPRESSION ET SON PROCEDE DE FABRICATION
Abstract:
(EN) A lithographic stage (11) is carried by a platen (13) formed of a plurality of tiles containing a uniformly spaced grid of teeth (17) and having low reluctance and high resistivity. The teeth have been formed by powder metal technology using as powder particles of a ferromagnetic material, the particles being of high resistivity or coated with an insulating material. The space between the teeth is filled with non-magnetic material (18), such as epoxy, and the entire platen finished such that it has a smooth and uniform flat upper surface (16).
(FR) Une plaque d'impression lithographique (11) est portée par une platine (13) constituée d'une pluralité de carreaux contenant une grille de dents (17) uniformément espacées, et présentant une réluctance faible et une résistivité élevée. Les dents sont formées par la technologie des poudres métalliques, à l'aide de particules de poudre d'un matériau ferromagnétique dotées d'une résistivité élevée ou revêtues d'un matériau isolant. L'espace entre les dents est rempli d'un matériau non magnétique (18), tel que de l'époxy, et la platine entière est finie de façon à présenter une surface supérieure plane (16) lisse et uniforme.
Designated States: AL, AM, AT, AU, AZ, BA, BB, BG, BR, BY, CA, CH, CN, CU, CZ, DE, DK, EE, ES, FI, GB, GE, HU, IL, IS, JP, KE, KG, KP, KR, KZ, LC, LK, LR, LS, LT, LU, LV, MD, MG, MK, MN, MW, MX, NO, NZ, PL, PT, RO, RU, SD, SE, SG, SI, SK, TJ, TM, TR, TT, UA, UG, UZ, VN
African Regional Intellectual Property Organization (ARIPO) (KE, LS, MW, SD, SZ, UG)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, CH, DE, DK, ES, FI, FR, GB, GR, IE, IT, LU, MC, NL, PT, SE)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)
Also published as:
AU1996077323