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1. (WO1997019343) METHOD OF, AND APPARATUS FOR, ANALYZING SURFACE IMPURITIES OF MINUTE AREA
Latest bibliographic data on file with the International Bureau

Pub. No.: WO/1997/019343 International Application No.: PCT/JP1996/003406
Publication Date: 29.05.1997 International Filing Date: 21.11.1996
IPC:
G01N 23/225 (2006.01) ,H01J 37/252 (2006.01)
G PHYSICS
01
MEASURING; TESTING
N
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
23
Investigating or analysing materials by the use of wave or particle radiation not covered by group G01N21/ or G01N22/159
22
by measuring secondary emission
225
using electron or ion microprobe
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37
Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
252
Tubes for spot-analysing by electron or ion beams; Microanalysers
Applicants:
ADVANTEST CORPORATION [JP/JP]; 32-1, Asahicho 1-chome Nerima-ku Tokyo 179, JP (AllExceptUS)
TABUSE, Kazuhiko [JP/JP]; JP (UsOnly)
WATANABE, Masao [JP/JP]; JP (UsOnly)
Inventors:
TABUSE, Kazuhiko; JP
WATANABE, Masao; JP
Agent:
WAKABAYASHI, Tadashi; 16th Kowa Building, 8th floor 9-20, Akasaka 1-chome Minato-ku Tokyo 107, JP
Priority Data:
7/30288921.11.1995JP
Title (EN) METHOD OF, AND APPARATUS FOR, ANALYZING SURFACE IMPURITIES OF MINUTE AREA
(FR) PROCEDE ET APPAREIL POUR ANALYSER DES IMPURETES DE SURFACE, SUR UNE TOUTE PETITE ZONE
Abstract:
(EN) A method of analysis for determining surface impurities of a minute area. The analysis method comprises the step of irradiating a minute area with an accelerated electron beam to desorb organic molecules, and subjecting them to mass analysis, wherein the beam acceleration voltage is such that it is sufficient to cause ESD.
(FR) L'invention concerne une méthode d'analyse des impuretés de surface, sur une toute petite zone. La méthode d'analyse consiste à irradier une toute petite zone avec un faisceau d'électrons accélérés pour désorber les molécules organiques contaminantes et à les soumettre à une analyse de masse. La tension d'accélération du faisceau est suffisante pour provoquer une décharge électrostatique.
Designated States: DE, GB, JP, US
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)
Also published as:
US5877496