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1. (WO1997017166) LASER STRIPPING IMPROVEMENT BY MODIFIED GAS COMPOSITION
Latest bibliographic data on file with the International Bureau

Pub. No.: WO/1997/017166 International Application No.: PCT/IL1996/000138
Publication Date: 15.05.1997 International Filing Date: 04.11.1996
Chapter 2 Demand Filed: 28.05.1997
IPC:
B23K 26/12 (2006.01) ,G03F 7/42 (2006.01)
B PERFORMING OPERATIONS; TRANSPORTING
23
MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
K
SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
26
Working by laser beam, e.g. welding, cutting, boring
12
in a special atmosphere, e.g. in an enclosure
G PHYSICS
03
PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
F
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
7
Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
26
Processing photosensitive materials; Apparatus therefor
42
Stripping or agents therefor
Applicants:
ORAMIR SEMICONDUCTOR EQUIPMENT LTD. [IL/IL]; P.O. Box 14 31000 Haifa, IL (AllExceptUS)
LIVSHITS (BUYANER), Boris [IL/IL]; IL (UsOnly)
GENUT, Menachem [IL/IL]; IL (UsOnly)
TEHAR-ZAHAV, Ofer [IL/IL]; IL (UsOnly)
Inventors:
LIVSHITS (BUYANER), Boris; IL
GENUT, Menachem; IL
TEHAR-ZAHAV, Ofer; IL
Agent:
LUZZATTO, Kfir ; Luzzatto & Luzzatto P.O. Box 5352 84152 Beer-Sheva, IL
Priority Data:
11593109.11.1995IL
Title (EN) LASER STRIPPING IMPROVEMENT BY MODIFIED GAS COMPOSITION
(FR) MODIFICATION DE COMPOSITION DE GAZ AMELIORANT LA RESORPTION PAR LASER
Abstract:
(EN) A method and apparatus for accelerating a laser stripping process carried out in a reactive gas mixture, comprising carrying out the stripping process in the presence of an accelerating effective amount of NxOy gas.
(FR) La présente invention concerne un procédé et un dispositif accélérant le processus de résorption laser s'exécutant dans un mélange de gaz de réaction. Le procédé consiste à mener le processus de résorption en présence d'une quantité suffisante de gaz NxOy accélérant le processus.
Designated States: AL, AM, AT, AU, AZ, BA, BB, BG, BR, BY, CA, CH, CN, CU, CZ, DE, DK, EE, ES, FI, GB, GE, HU, IL, IS, JP, KE, KG, KP, KR, KZ, LC, LK, LR, LS, LT, LU, LV, MD, MG, MK, MN, MW, MX, NO, NZ, PL, PT, RO, RU, SD, SE, SG, SI, SK, TJ, TM, TR, TT, UA, UG, US, UZ, VN
African Regional Intellectual Property Organization (ARIPO) (KE, LS, MW, SD, SZ, UG)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, CH, DE, DK, ES, FI, FR, GB, GR, IE, IT, LU, MC, NL, PT, SE)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)
Also published as:
SG53251EP0859684US6350391JP2000500282KR1019990067432AU1996073309