Some content of this application is unavailable at the moment.
If this situation persist, please contact us atFeedback&Contact
1. (WO1997016946) UNIFORM PLASMA GENERATION, FILTER, AND NEUTRALIZATION APPARATUS AND METHOD
Latest bibliographic data on file with the International Bureau

Considered void 24.04.1997


Pub. No.: WO/1997/016946 International Application No.: PCT/US1996/017970
Publication Date: 09.05.1997 International Filing Date: 31.10.1996
IPC:
H01J 37/32 (2006.01)
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37
Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
32
Gas-filled discharge tubes
Applicants:
ARAKHNE TECHNOLOGY, INC. [US/US]; Building II Suite 300 1250 Capital of Texas Highway S. Austin, TX 78746, US
Inventors:
AUM, Paul, Kwangsup; US
Agent:
CULBERTSON, Russell, D. ; Shaffer & Culbertson Building 1, Suite 360 1250 Capital of Texas Highway S. Austin, TX 78746, US
Priority Data:
08/551,12231.10.1995US
08/551,12331.10.1995US
08/551,13131.10.1995US
Title (EN) UNIFORM PLASMA GENERATION, FILTER, AND NEUTRALIZATION APPARATUS AND METHOD
(FR) APPAREIL DE PRODUCTION UNIFORME, DE FILTRAGE ET DE NEUTRALISATION DE PLASMA, ET PROCEDE CORRESPONDANT
Abstract:
(EN) A system (30, 120, 140, 200, 250, 300, 350, 400, 450) and method (550, 600, 700) for generating, filtering, and neutralizing surface treating plasma (38) within a process chamber (36) to allow a uniform plasma to surface treat a substrate (40). A plurality of coil elements (46) are operably coupled to form a plurality of effective coils (47), the effective coils (47) adjacently spaced apart to form a coil layer (32). A drive element (34) may be coupled to coil elements (46) to induce effective closed loop currents (48) in the effective coils (47) to induce magnetic fields (50, 52) at each effective coil (47). The coil elements (46) may also simply be terminated such that the application of plasma (38) induces the magnetic fields (50, 52) at the effective coil. The magnetic fields (50, 52) may be induced to generate a plasma (38), to confine plasma away from hardware, to filter a plasma, and to neutralize plasma.
(FR) La présente invention concerne un système (30, 120, 140, 200, 250, 300, 350, 400, 450) et un procédé (550, 600, 700) de production, de filtrage et de neutralisation du plasma (38) de traitement de surface à l'intérieur d'une chambre de traitement (36) permettant d'obtenir un plasma uniforme pour le traitement de surface d'un substrat (40). Plusieurs éléments de bobine (46) sont fonctionnellement couplés de façon à former une pluralité de bobines efficaces (47), les bobines efficaces (47) étant espacées de proche en proche de façon à former une couche de bobines (32). Un excitateur (34) peut être couplé aux éléments de bobine (46) pour induire dans les bobines efficaces (47) des courants en boucle efficaces (48) induisant à leur tour des champs magnétiques (50, 52) au niveau de chaque bobine efficace (47). Les éléments de bobine (46) peuvent également simplement être raccordés de façon telle que l'application de plasma (38) induise les champs magnétiques (50, 52) au niveau des bobines efficaces. Ces champs magnétiques (50, 52) peuvent être induits de façon à produire un plasma (38), ce qui permet de confiner le plasma à distance du matériel, de filtrer un plasma, et de neutraliser le plasma.
Designated States: AL, AM, AT, AU, AZ, BB, BG, BR, BY, CA, CH, CN, CZ, DE, DK, EE, ES, FI, GB, GE, HU, IS, JP, KE, KG, KP, KR, KZ, LK, LR, LS, LT, LU, LV, MD, MG, MK, MN, MW, MX, NO, NZ, PL, PT, RO, RU, SD, SE, SG, SI, SK, TJ, TM, TR, TT, UA, UG, UZ, VN
African Regional Intellectual Property Organization (ARIPO) (KE, LS, MW, SD, SZ, UG)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, CH, DE, DK, ES, FI, FR, GB, GR, IE, IT, LU, MC, NL, PT, SE)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)
Also published as:
AU1997014060