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1. (WO1997015978) INTEGRATED MAGNETIC LEVITATION AND ROTATION SYSTEM
Latest bibliographic data on file with the International Bureau

Pub. No.: WO/1997/015978 International Application No.: PCT/US1996/016829
Publication Date: 01.05.1997 International Filing Date: 18.10.1996
Chapter 2 Demand Filed: 26.02.1997
IPC:
F16C 39/06 (2006.01) ,H02K 7/09 (2006.01) ,H02K 17/12 (2006.01) ,H02K 21/38 (2006.01)
F MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
16
ENGINEERING ELEMENTS OR UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
C
SHAFTS; FLEXIBLE SHAFTS; MECHANICAL MEANS FOR TRANSMITTING MOVEMENT IN A FLEXIBLE SHEATHING; ELEMENTS OF CRANKSHAFT MECHANISMS; PIVOTS; PIVOTAL CONNECTIONS; ROTARY ENGINEERING ELEMENTS OTHER THAN GEARING, COUPLING, CLUTCH OR BRAKE ELEMENTS; BEARINGS
39
Relieving load on bearings
06
using magnetic means
H ELECTRICITY
02
GENERATION, CONVERSION, OR DISTRIBUTION OF ELECTRIC POWER
K
DYNAMO-ELECTRIC MACHINES
7
Arrangements for handling mechanical energy structurally associated with the machine, e.g. structural association with mechanical driving motor or auxiliary dynamo-electric machine
08
Structural association with bearings
09
with magnetic bearings
H ELECTRICITY
02
GENERATION, CONVERSION, OR DISTRIBUTION OF ELECTRIC POWER
K
DYNAMO-ELECTRIC MACHINES
17
Asynchronous induction motors; Asynchronous induction generators
02
Asynchronous induction motors
12
for multi-phase current
H ELECTRICITY
02
GENERATION, CONVERSION, OR DISTRIBUTION OF ELECTRIC POWER
K
DYNAMO-ELECTRIC MACHINES
21
Synchronous motors having permanent magnet; Synchronous generators having permanent magnet
38
with rotating flux distributor, and armature and magnet both stationary
Applicants:
SATCON TECHNOLOGY CORPORATION [US/US]; 161 First Street Cambridge, MA 02142-1221, US
Inventors:
NICHOLS, Stephen, B.; US
JAGANNATHAN, Shankar; US
LEARY, Kevin; US
EISENHAURE, David; US
STANTON, William; US
HOCKNEY, Richard; US
DOWNER, James; US
GONDHALEKAR, Vijay; US
Agent:
MANUS, Peter, J. ; Dike, Bronstein, Roberts & Cushman, L.L.P. 130 Water Street Boston, MA 02109, US
Priority Data:
08/548,69226.10.1995US
Title (EN) INTEGRATED MAGNETIC LEVITATION AND ROTATION SYSTEM
(FR) SYSTEME MAGNETIQUE INTEGRE DE LEVITATION ET DE ROTATION
Abstract:
(EN) A rotary motor and a rotary magnetic bearing are integrated in a compact assembly (10) that is contactless. A stator assembly (16) surrounds a ferromagnetic rotor (18) with an annular air gap (20) which can accommodate a cylindrical wall (12e), e.g. of a chamber, for semiconductor wafer processing. The stator assembly (16) has a permanent magnet (38) or magnets sandwiched between vertically spaced magnetic stator plates (36) with plural pole segments (36a). The rotor is preferably a ring of magnetic stainless steel with complementary pole teeth (18c). The stator assembly levitates and passively centers the rotor along a vertical axis and against tilt about the either horizontal axis (26, 28), provides a radial position bias for the rotor, and establishes a motor flux field at the rotor poles. Polyphase coils (40) wound on the stator plates (36) produce a rotating flux field that drives the rotor as a synchronous homopolar motor. A rotor without pole teeth allows operation with an asynchronous inductive drive. A controller (54) energizes control coils (42) wound on each stator pole segment (36a) in response to a sensed physical position of the rotor. The control coils (42) provide active radial position control and can actively damp tip and tilt oscillations that may overcome the passive centering.
(FR) Un moteur rotatif et un palier magnétique rotatif sont intégrés pour former une unité compacte (10), fonctionnant sans contact. Un stator (16) entoure un rotor ferromagnétique (18) avec un espace d'air annulaire (20) qui peut recevoir une paroi cylindrique (12e), par exemple une chambre, pour le traitement de tranches de semi-conducteur. Le stator (16) a un ou des aimants permanents (38) en sandwich entre des plaques magnétiques (36) de stator espacées verticalement, avec une pluralité de segments polaires (36a). Le rotor (27) est, de préférence, un anneau en acier inoxydable magnétique avec des dents polaires complémentaires (18c). Le stator (16) subit une lévitation et centre passivement le rotor le long d'un axe vertical, empêche son inclinaison par rapport à l'un ou l'autre axe horizontal (26, 28), donne au rotor (22) une polarisation en position radiale et fournit du champ de flux moteur aux pôles du rotor. Des enroulements polyphasés (40) enroulés autour des plaques (36) du stator, produisent un champ à flux tournant qui entraîne le rotor (22) à la manière d'un moteur homopolaire synchrone. Un rotor (22) sans dents polaires permet un fonctionnement avec un entraînement inductif asynchrone. Un dispositif de commande (54) alimente les enroulements de commande (42) enroulés sur chaque segment (36a) polaire de stator, en réponse à une position spatiale détectée du rotor (22). Les enroulements de commande (42) assurent une commande active de la position radiale et permettent d'amortir activement les oscillations longitudinales et transversales qui pourraient empêcher le centrage passif.
Designated States: CA, JP, KR, MX
European Patent Office (AT, BE, CH, DE, DK, ES, FI, FR, GB, GR, IE, IT, LU, MC, NL, PT, SE)
Publication Language: English (EN)
Filing Language: English (EN)
Also published as:
EP0876702EP1655820JP4165903 JPH11513880 CA2233707KR1019990067113