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1. (WO1997015697) APPARATUS FOR AFFIXING A ROTATING CYLINDRICAL MAGNETRON TARGET TO A SPINDLE
Latest bibliographic data on file with the International Bureau

Pub. No.: WO/1997/015697 International Application No.: PCT/US1996/018186
Publication Date: 01.05.1997 International Filing Date: 28.10.1996
Chapter 2 Demand Filed: 27.05.1997
IPC:
C23C 14/34 (2006.01) ,H01J 37/34 (2006.01)
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
22
characterised by the process of coating
34
Sputtering
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37
Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
32
Gas-filled discharge tubes
34
operating with cathodic sputtering
Applicants:
VANDERSTRAETEN E. BVBA [BE/BE]; Industriezone E.376 Laan 75-79 B-9800 Deinze, BE (AllExceptUS)
MORGAN, Steven [US/US]; US
VANDERSTRAETEN, Johan [BE/BE]; BE
VANDERSTRAETEN, Erwin [BE/BE]; BE
GOBIN, Guy [BE/BE]; BE
Inventors:
MORGAN, Steven; US
VANDERSTRAETEN, Johan; BE
VANDERSTRAETEN, Erwin; BE
GOBIN, Guy; BE
Agent:
JOHNSON, Larry, D.; Suite 130 175 N. Redwood Drive San Rafael, CA 94903, US
Priority Data:
08/549,24627.10.1995US
Title (EN) APPARATUS FOR AFFIXING A ROTATING CYLINDRICAL MAGNETRON TARGET TO A SPINDLE
(FR) PROCEDE ET INSTRUMENT PERMETTANT DE FIXER UNE CIBLE ROTATIVE CYLINDRIQUE DE MAGNETRON SUR UN AXE
Abstract:
(EN) An apparatus to releasably affix a rotating cylindrical magnetron target (10) to a spindle (20) utilizes a threaded spindle collar (30) engaging threads (70) on the outside surface of the target (10), with a single water-to-vacuum seal (40) located at the target and spindle interface. The threads (70) may be removable from the target, enabling efficient assembly/disassembly and recycling.
(FR) Cet instrument, qui permet de fixer de façon libérable une cible rotative cylindrique de magnétron (10) sur un axe (20), fait appel à une bague filetée d'axe (30) qui entre en prise avec des filets (70) disposés à la surface extérieure de la cible (10), un seul joint d'étanchéité eau-vide (40) étant placé à l'interface cible-axe. On peut retirer les filets (70) de la cible, ce qui permet un montage, un démontage et un recyclage efficaces.
Designated States: AL, AM, AT, AU, AZ, BA, BB, BG, BR, BY, CA, CH, CN, CU, CZ, DE, DK, EE, ES, FI, GB, GE, HU, IL, IS, JP, KE, KG, KP, KR, KZ, LC, LK, LR, LS, LT, LU, LV, MD, MG, MK, MN, MW, MX, NO, NZ, PL, PT, RO, RU, SD, SE, SG, SI, SK, TJ, TM, TR, TT, UA, UG, US, UZ, VN
African Regional Intellectual Property Organization (ARIPO) (KE, LS, MW, SD, SZ, UG)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, CH, DE, DK, ES, FI, FR, GB, GR, IE, IT, LU, MC, NL, PT, SE)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)
Also published as:
EP0873431JP2002515940 ES2385791CA2235864AU1996077298