Some content of this application is unavailable at the moment.
If this situation persist, please contact us atFeedback&Contact
1. (WO1997015533) PHOTO-ENCODED SELECTIVE ETCHING FOR GLASS BASED MICROTECHNOLOGY APPLICATIONS
Latest bibliographic data on file with the International Bureau

Pub. No.: WO/1997/015533 International Application No.: PCT/US1996/016830
Publication Date: 01.05.1997 International Filing Date: 18.10.1996
Chapter 2 Demand Filed: 12.11.1996
IPC:
C03C 15/00 (2006.01) ,C03C 23/00 (2006.01) ,C03C 25/62 (2006.01) ,C03C 25/68 (2006.01) ,G02B 5/18 (2006.01) ,G02B 6/12 (2006.01) ,G02B 6/122 (2006.01) ,G02B 6/36 (2006.01) ,G03F 7/004 (2006.01)
C CHEMISTRY; METALLURGY
03
GLASS; MINERAL OR SLAG WOOL
C
CHEMICAL COMPOSITION OF GLASSES, GLAZES, OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
15
Surface treatment of glass, not in the form of fibres or filaments, by etching
C CHEMISTRY; METALLURGY
03
GLASS; MINERAL OR SLAG WOOL
C
CHEMICAL COMPOSITION OF GLASSES, GLAZES, OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
23
Other surface treatment of glass not in the form of fibres or filaments
C CHEMISTRY; METALLURGY
03
GLASS; MINERAL OR SLAG WOOL
C
CHEMICAL COMPOSITION OF GLASSES, GLAZES, OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
25
Surface treatment of fibres or filaments from glass, minerals, or slags
62
by application of electric or wave energy or particle radiation, or by ion implantation
C CHEMISTRY; METALLURGY
03
GLASS; MINERAL OR SLAG WOOL
C
CHEMICAL COMPOSITION OF GLASSES, GLAZES, OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
25
Surface treatment of fibres or filaments from glass, minerals, or slags
66
Chemical treatment, e.g. leaching, acid or alkali treatment
68
by etching
G PHYSICS
02
OPTICS
B
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
5
Optical elements other than lenses
18
Diffracting gratings
G PHYSICS
02
OPTICS
B
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
6
Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
10
of the optical waveguide type
12
of the integrated circuit kind
G PHYSICS
02
OPTICS
B
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
6
Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
10
of the optical waveguide type
12
of the integrated circuit kind
122
Basic optical elements, e.g. light-guiding paths
G PHYSICS
02
OPTICS
B
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
6
Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
24
Coupling light guides
36
Mechanical coupling means
G PHYSICS
03
PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
F
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
7
Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
004
Photosensitive materials
04
Chromates
Applicants:
BROWN UNIVERSITY RESEARCH FOUNDATION [US/US]; 42 Charlesfield Street Providence, RI 02912, US
Inventors:
LAWANDY, Nabil, M.; US
Agent:
GREEN, Clarence, A.; Perman & Green 425 Post Road Fairfield, CT 06430, US
Priority Data:
08/731,56516.10.1996US
60/005,97326.10.1995US
Title (EN) PHOTO-ENCODED SELECTIVE ETCHING FOR GLASS BASED MICROTECHNOLOGY APPLICATIONS
(FR) ATTAQUE CHIMIQUE SELECTIVE A CODAGE OPTIQUE POUR LES APPLICATIONS DE MICROTECHNOLOGIES AU VERRE
Abstract:
(EN) Two-photon excitation of charge carriers in boron E'-center containing borosilicate glasses (4) is shown to result in a photo-encoding of selectively etchable regions. Using a turbulent process (30) followed by polishing, a number of patterning capabilities for microtechnology applications are achieved, such as ultra-fast capillary electrophoresis chips and rapid prototyping of diffractive optical elements.
(FR) L'invention concerne une excitation photonique double des porteurs de charge dans les centres E' du bore qui contiennent des matériaux en verre à base de borosilicate (4), ce qui permet d'obtenir le codage optique de différentes zones pouvant être attaquées de manière sélective. Au moyen d'un procédé à turbulence (30) suivi d'une phase de polissage, on peut réaliser un certain nombre de motifs pour les applications de microtechnologie, à savoir par exemple: fabrication de puces par électrophorèse capillaire en mode ultra rapide et prototypage rapide d'éléments optiques de diffraction.
Designated States: AL, AM, AT, AU, AZ, BA, BB, BG, BR, BY, CA, CH, CN, CU, CZ, DE, DK, EE, ES, FI, GB, GE, HU, IL, IS, JP, KE, KG, KP, KR, KZ, LC, LK, LR, LS, LT, LU, LV, MD, MG, MK, MN, MW, MX, NO, NZ, PL, PT, RO, RU, SD, SE, SG, SI, SK, TJ, TM, TR, TT, UA, UG, UZ, VN
African Regional Intellectual Property Organization (ARIPO) (KE, LS, MW, SD, SZ, UG)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, CH, DE, DK, ES, FI, FR, GB, GR, IE, IT, LU, MC, NL, PT, SE)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)
Also published as:
AU1996074610