Some content of this application is unavailable at the moment.
If this situation persists, please contact us atFeedback&Contact
1. (WO1997015423) SUBSTRATE TRANSPORT APPARATUS WITH DUAL SUBSTRATE HOLDERS
Latest bibliographic data on file with the International Bureau

Pub. No.: WO/1997/015423 International Application No.: PCT/US1996/016779
Publication Date: 01.05.1997 International Filing Date: 18.10.1996
Chapter 2 Demand Filed: 12.11.1996
IPC:
B25J 9/10 (2006.01)
B PERFORMING OPERATIONS; TRANSPORTING
25
HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; HANDLES FOR HAND IMPLEMENTS; WORKSHOP EQUIPMENT; MANIPULATORS
J
MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
9
Programme-controlled manipulators
10
characterised by positioning means for manipulator elements
Applicants:
BROOKS AUTOMATION INC. [US/US]; 15 Elizabeth Drive Chelmsford, MA 01824, US
Inventors:
DAVIS, James, C., Jr.; US
HOFMEISTER, Christopher, A.; US
Agent:
GREEN, Clarence, A.; Perman & Green 425 Post Road Fairfield, CT 06430, US
Priority Data:
08/549,99527.10.1995US
Title (EN) SUBSTRATE TRANSPORT APPARATUS WITH DUAL SUBSTRATE HOLDERS
(FR) APPAREIL DE TRANSPORT DE SUBSTRATS A DEUX PORTE-SUBSTRATS
Abstract:
(EN) A substrate transport apparatus (12) having a movable arm assembly (18), two substrate holders (22, 23) and a coaxial drive shaft assembly (20). The movable arm assembly (18) has a general X-shaped shaft assembly (20). The substrate holders (22, 23) are connected to different pairs of arm sections (30, 31, 32, 33) of the X-shaped section (28). The coaxial drive shaft assembly (20) moves the arms (34, 35, 36) of the X-substrate holders (22, 23) in reverse unison motion between extended and retracted positions.
(FR) Appareil (12) de transport de substrats doté d'un ensemble bras mobile (18), de deux porte-substrats (22, 23) et d'un ensemble arbre d'entraînement coaxial (20). L'ensemble bras mobile (18) possède un ensemble arbre (20) en forme générale de X. Les porte-substrats (22, 23) sont couplés à des paires différentes de parties (30, 31, 32, 33) de bras de la partie (28) en forme de X. L'ensemble arbre d'entraînement coaxial (20) déplace les bras (34, 35, 36) des porte-substrats (22, 23) qui exécutent des déplacements synchronisés dans des sens opposés entre des positions étendue et rétractée.
Designated States: AL, AM, AT, AU, AZ, BA, BB, BG, BR, BY, CA, CH, CN, CU, CZ, DE, DK, EE, ES, FI, GB, GE, HU, IL, IS, JP, KE, KG, KP, KR, KZ, LC, LK, LR, LS, LT, LU, LV, MD, MG, MK, MN, MW, MX, NO, NZ, PL, PT, RO, RU, SD, SE, SG, SI, SK, TJ, TM, TR, TT, UA, UG, UZ, VN
African Regional Intellectual Property Organization (ARIPO) (KE, LS, MW, SD, SZ, UG)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, CH, DE, DK, ES, FI, FR, GB, GR, IE, IT, LU, MC, NL, PT, SE)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)
Also published as:
EP0862510JP2008055599JP4063323 JPH11514303KR1019990067126AU1996075175