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Machine translation
1. (WO1997013273) FORMATION OF SOURCE/DRAIN FROM DOPED GLASS
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/1997/013273    International Application No.:    PCT/US1996/016002
Publication Date: 10.04.1997 International Filing Date: 03.10.1996
Chapter 2 Demand Filed:    28.04.1997    
IPC:
H01L 21/225 (2006.01), H01L 21/336 (2006.01), H01L 21/8238 (2006.01)
Applicants: INTEL CORPORATION [US/US]; 2200 Mission College Boulevard, Santa Clara, CA 95052 (US) (For All Designated States Except US).
THOMPSON, Scott, E. [US/US]; (US) (For US Only).
JAN, Chia-Hong [US/US]; (US) (For US Only).
PACKAN, Paul, A. [CA/US]; (US) (For US Only).
GHANI, Tahir [US/US]; (US) (For US Only).
ANDIDEH, Ebrahim [US/US]; (US) (For US Only).
MOGHADAM, Farhad [US/US]; (US) (For US Only).
BOHR, Mark, T. [US/US]; (US) (For US Only)
Inventors: THOMPSON, Scott, E.; (US).
JAN, Chia-Hong; (US).
PACKAN, Paul, A.; (US).
GHANI, Tahir; (US).
ANDIDEH, Ebrahim; (US).
MOGHADAM, Farhad; (US).
BOHR, Mark, T.; (US)
Agent: TAYLOR, Edwin, H.; Blakely, Sokoloff, Taylor & Zafman, Seventh floor, 12400 Wilshire Boulevard, Los Angeles, CA 90025-1026 (US)
Priority Data:
08/538,846 04.10.1995 US
Title (EN) FORMATION OF SOURCE/DRAIN FROM DOPED GLASS
(FR) FORMATION D'UNE REGION DE SOURCE ET DE DRAIN EN VERRE DOPE
Abstract: front page image
(EN)A process for fabricating a source and drain region which includes a more lightly doped source and drain tip region immediately adjacent to the gate and a more heavily doped main portion of the source and drain region spaced apart from the gate. A first layer (16) of glass (2 % BSG) is used to provide the source of doping for the tip region and a second layer (35) of glass (6 % BSG) is used to provide the dopant for the more heavily doped major portion of source and drain regions. Spacers (31) are formed between the glass layers to define the tip region from the main portion of the source and drain regions.
(FR)L'invention concerne un procédé de fabrication d'une région de source et de drain comprenant une région d'extrémité de source et de drain jouxtant la grille, qui est plus légèrement dopée, et une partie principale de la région de source et de drain espacée de la grille qui est plus fortement dopée. Une première couche (16) de verre (verre de borosilicate 2%) sert à constituer une source de dopage pour la région d'extrémité et une seconde couche (35) de verre (verre de borosilicate 6%) apporte le dopant à la portion de la partie principale des régions de source et de drain plus fortement dopée. Des éléments d'espacement (31) sont formés entre les couches de verre pour séparer la portion d'extrémité de la partie principale des régions de source et de drain.
Designated States: AL, AM, AT, AU, AZ, BA, BB, BG, BR, BY, CA, CH, CN, CU, CZ, DE, DK, EE, ES, FI, GB, GE, HU, IL, IS, JP, KE, KG, KP, KR, KZ, LC, LK, LR, LS, LT, LU, LV, MD, MG, MK, MN, MW, MX, NO, NZ, PL, PT, RO, RU, SD, SE, SG, SI, SK, TJ, TM, TR, TT, UA, UG, US, UZ, VN.
African Regional Intellectual Property Organization (KE, LS, MW, SD, SZ, UG)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, MD, RU, TJ, TM)
European Patent Office (AT, BE, CH, DE, DK, ES, FI, FR, GB, GR, IE, IT, LU, MC, NL, PT, SE)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)