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1. WO1996041384 - PIEZOELECTRIC BENDING TRANSDUCER

Publication Number WO/1996/041384
Publication Date 19.12.1996
International Application No. PCT/DE1996/000996
International Filing Date 05.06.1996
Chapter 2 Demand Filed 12.11.1996
IPC
H01L 41/09 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
41Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
08Piezo-electric or electrostrictive elements
09with electrical input and mechanical output
CPC
H01L 41/081
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
41Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
08Piezo-electric or electrostrictive devices
0805based on piezo-electric or electrostrictive films or coatings
081characterised by the underlying base, e.g. substrates
H01L 41/094
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
41Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
08Piezo-electric or electrostrictive devices
09with electrical input and mechanical output ; , e.g. actuators, vibrators
0926using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
0933Beam type
094Cantilevers, i.e. having one fixed end
Applicants
  • SIEMENS AKTIENGESELLSCHAFT [DE]/[DE] (AllExceptUS)
  • STEIN, Christian [AT]/[DE] (UsOnly)
  • MÖCKL, Thomas [DE]/[DE] (UsOnly)
  • RIEDEL, Michael [DE]/[DE] (UsOnly)
Inventors
  • STEIN, Christian
  • MÖCKL, Thomas
  • RIEDEL, Michael
Priority Data
195 20 796.307.06.1995DE
Publication Language German (DE)
Filing Language German (DE)
Designated States
Title
(DE) PIEZOELEKTRISCHER BIEGEWANDLER
(EN) PIEZOELECTRIC BENDING TRANSDUCER
(FR) TRANSDUCTEUR PIEZO-ELECTRIQUE DE FLEXION
Abstract
(DE)
Bei einem piezoelektrischen Biegewandler soll bei Temperaturbelastung eine thermische Eigenverbiegung vermieden werden. Dies erfolgt erfindungsgemäß dadurch, daß der Biegewandler (2, 12, 14) eine auf eine Trägerschicht (4, 16, 18) aufgebrachte Piezokeramikschicht (6, 8) hat und das Material der Piezokeramikschicht (6, 8) und der Trägerschicht (4, 16, 18) im wesentlichen identische thermische Ausdehnungskoeffizienten haben.
(EN)
The object of the invention is to provide a piezoelectric bending transducer in which inherent bending brought about by heat is prevented when the transducer is subjected to thermal stress. According to the invention, this object is achieved in that the bending transducer (2, 12, 14) has a piezoceramic layer (6, 8) applied to a carrier layer (4, 16, 18) and the materials of the piezoceramic layer (6, 8) and of the carrier layer (4, 16, 18) have substantially identical coefficients of thermal expansion.
(FR)
L'invention concerne un transducteur piézo-électrique de flexion et permet d'éviter, en cas de contrainte thermique, la courbure thermique inhérente. A cet effet, le transducteur de courbure (2, 12, 14) est doté d'une couche piézocéramique (6, 8) appliquée sur une couche support (4, 16, 18) et les matériaux de la couche piézocéramique (6, 8) et de la couche support (4, 16, 18) possèdent des coefficients de dilatation thermique sensiblement identiques.
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