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1. WO1996039794 - POWER SUPPLY FOR MULTIELECTRODE DISCHARGE

Publication Number WO/1996/039794
Publication Date 12.12.1996
International Application No. PCT/JP1996/001521
International Filing Date 05.06.1996
Chapter 2 Demand Filed 02.10.1996
IPC
H01J 37/32 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
32Gas-filled discharge tubes
H05H 1/46 2006.01
HELECTRICITY
05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
HPLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY- CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
1Generating plasma; Handling plasma
24Generating plasma
46using applied electromagnetic fields, e.g. high frequency or microwave energy
CPC
C01B 13/115
CCHEMISTRY; METALLURGY
01INORGANIC CHEMISTRY
BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; ; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
13Oxygen; Ozone; Oxides or hydroxides in general
10Preparation of ozone
11by electric discharge
115characterised by the electrical circuits producing the electrical discharge
C01B 2201/12
CCHEMISTRY; METALLURGY
01INORGANIC CHEMISTRY
BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; ; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
2201Preparation of ozone by electrical discharge
10Dischargers used for production of ozone
12Plate-type dischargers
C01B 2201/64
CCHEMISTRY; METALLURGY
01INORGANIC CHEMISTRY
BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; ; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
2201Preparation of ozone by electrical discharge
60Feed streams for electrical dischargers
64Oxygen
C01B 2201/90
CCHEMISTRY; METALLURGY
01INORGANIC CHEMISTRY
BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; ; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
2201Preparation of ozone by electrical discharge
90Control of the process
H01J 37/32082
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
32Gas-filled discharge tubes, ; e.g. for surface treatment of objects such as coating, plating, etching, sterilising or bringing about chemical reactions
32009Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
32082Radio frequency generated discharge
H01J 37/32174
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
32Gas-filled discharge tubes, ; e.g. for surface treatment of objects such as coating, plating, etching, sterilising or bringing about chemical reactions
32009Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
32082Radio frequency generated discharge
32174Circuits specially adapted for controlling the RF discharge
Applicants
  • TOHOKU UNICOM CO., LTD. [JP]/[JP] (AllExceptUS)
  • MATSUMOTO, Kazunori [JP]/[JP] (UsOnly)
  • NAJIMA, Toru [JP]/[JP] (UsOnly)
Inventors
  • MATSUMOTO, Kazunori
  • NAJIMA, Toru
Agents
  • MAKI, Tetsuro
Priority Data
7/16137905.06.1995JP
7/16138005.06.1995JP
7/18079223.06.1995JP
7/18468928.06.1995JP
Publication Language Japanese (JA)
Filing Language Japanese (JA)
Designated States
Title
(EN) POWER SUPPLY FOR MULTIELECTRODE DISCHARGE
(FR) ALIMENTATION SERVANT A UNE DECHARGE PAR ELECTRODES MULTIPLES
Abstract
(EN)
A novel type of power supply for AC discharge by which the discharge is easily performed even when insulators adhere to electrodes or the gas pressure drops and variation of plasma parameters with time is very small. A power divider (2) divides a signal from a master oscillator (1) into a plurality of signals and phase shifters (3) and power amplifiers (4) respectively determine the phases and amplitudes of the divided signals. A controller (7) controls and adjusts the oscillation frequency, and the phases and amplitudes of the divided signals. The final outputs are produced through transformers (5) and fed to a plurality of electrodes (6) arranged in a discharge enclosure. The transformers (5) are connected to each other on the output side by one of their outputs which are normally maintained at a floating potential, and discharge is made to take place between the electrodes (6). The phases and amplitudes of the electrodes (6) are arbitrary and may be the same respectively. The phases are controlled and the amplitudes are adjusted most appropriately to the controlled system. In addition, the shapes and arrangement of the electrodes (6) are also arbitrary and made appropriate to the system.
(FR)
L'invention porte sur un nouveau type d'alimentation pour décharges en courant alternatif permettant de produire les décharges même si les isolateurs touchent les électrodes, si la pression du gaz baisse, et si les paramètres du plasma varient très peu dans le temps. Un diviseur (2) divise le signal d'un oscillateur principal (1) en une série se signaux, tandis que des déphaseurs (3) et des amplificateurs de puissance (4) fixent respectivement la phase et l'amplitude des signaux résultant de la division. Un régulateur (7) commande et règle la fréquence d'oscillation et le phase et l'amplitude des signaux résultant de la division. Les sorties finales, produites par l'intermédiaire de transformateurs (5), alimentent une série d'électrodes (6) disposées dans l'enceinte de décharge. Les transformateurs (5) sont reliés par une de leurs sorties normalement maintenues à un potentiel flottant et la décharge se produit entre les électrodes (6). La phase et l'amplitude des électrodes sont arbitraires et peuvent éventuellement être identiques. Les phases sont commandées et les amplitudes sont adaptées de la manière la plus appropriée au système. De plus, les formes et la disposition des électrodes (6) sont également arbitraires et adaptées au système.
Also published as
Latest bibliographic data on file with the International Bureau