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1. WO1996010469 - X-Y-$g(U) POSITIONING MECHANISM

Publication Number WO/1996/010469
Publication Date 11.04.1996
International Application No. PCT/US1995/012900
International Filing Date 29.09.1995
Chapter 2 Demand Filed 03.05.1996
IPC
B23Q 1/62 2006.01
BPERFORMING OPERATIONS; TRANSPORTING
23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL, CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
1Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
25Movable or adjustable work or tool supports
44using particular mechanisms
56with sliding pairs only
60two sliding pairs only
62with perpendicular axes, e.g. cross-slides
G03F 7/20 2006.01
GPHYSICS
03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
7Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
20Exposure; Apparatus therefor
CPC
B23Q 1/623
BPERFORMING OPERATIONS; TRANSPORTING
23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING
1Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
25Movable or adjustable work or tool supports
44using particular mechanisms
56with sliding pairs only ; , the sliding pairs being the first two elements of the mechanism
60two sliding pairs only ; , the sliding pairs being the first two elements of the mechanism
62with perpendicular axes, e.g. cross-slides
621a single sliding pair followed perpendicularly by a single sliding pair
623followed perpendicularly by a single rotating pair
G03F 7/70716
GPHYSICS
03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR;
7Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
70Exposure apparatus for microlithography
70691Handling of masks or wafers
70716Stages
Applicants
  • BURTON, Gary, Lynn [US]/[US]
  • BURTON, Paul, Jeffrey [US]/[US]
Inventors
  • BURTON, Gary, Lynn
  • BURTON, Paul, Jeffrey
Agents
  • JOHNSON, Larry, D.
Priority Data
08/317,57004.10.1994US
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) X-Y-$g(U) POSITIONING MECHANISM
(FR) MECANISME DE POSITIONNEMENT X-Y-$g(U)
Abstract
(EN)
An improved X-Y-$g(U) positioning mechanism or stage having a rectangular platform (2) upon which a workpiece to be moved is placed. The platform is positioned by bearings (6a, 6b), which ride along its edges. In the preferred embodiment, the bearings are mounted to the ends of perpendicularly overlapping tracks (8x, 8y). The racks are linearly movable via corresponding forcing elements or motor coils (10x, 10y). The forcing elements are fixedly mounted to a main structure (14), to dissipate heat efficiently. Also in the preferred embodiment, positioning feedback for the stage includes an X-Y scale (4). Position sensors (12a, 12b) are mounted fixedly to the main structure directly under the X-Y scale. $g(U) rotation is achieved when two tracks are used for the same X or Y axis, so that the platform rotates as these two tracks are positioned slightly offset from one another.
(FR)
Mécanisme ou platine de positionnement amélioré X-Y-$g(U) possédant une plate-forme rectangulaire (2) sur laquelle on positionne une pièce à déplacer. La plate-forme est positionnée au moyen de supports (6a, 6b) se déplaçant le long de ses bords. Dans le mode de réalisation préféré, les supports sont montés aux extrémités de pistes se croisant perpendiculairement (8x, 8y). Ces pistes sont mobiles linéairement sous l'effet d'éléments de poussée correspondants ou de bobines de moteur (10x, 10y). Les éléments de poussée sont montés fixes sur une structure principale (14), afin de dissiper la chaleur efficacement. Egalement dans le mode de réalisation préféré, une échelle X-Y placée sur la platine permet d'obtenir un résultat de positionnement. Des détecteurs de position (12a, 12b) sont montés fixes sur la structure principale, directement sous l'échelle X-Y. La rotation $g(U) s'effectue quand on utilise deux pistes pour le même axe X ou Y, de telle façon que la platine effectue une rotation simultanément au positionnement de ces deux pistes avec un léger décalage réciproque.
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