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1. WO1996006202 - APPARATUS AND METHOD FOR MAKING METAL OXIDE SPUTTERING TARGETS

Publication Number WO/1996/006202
Publication Date 29.02.1996
International Application No. PCT/US1994/013593
International Filing Date 22.11.1994
Chapter 2 Demand Filed 18.03.1996
IPC
C04B 35/457 2006.01
CCHEMISTRY; METALLURGY
04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
BLIME; MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
35Shaped ceramic products characterised by their composition; Ceramic compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
01based on oxides
453based on zinc, tin or bismuth oxides or solid solutions thereof with other oxides, e.g. zincates, stannates or bismuthates
457based on tin oxides or stannates
C04B 35/645 2006.01
CCHEMISTRY; METALLURGY
04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
BLIME; MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
35Shaped ceramic products characterised by their composition; Ceramic compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
622Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
64Burning or sintering processes
645Pressure sintering
C23C 14/34 2006.01
CCHEMISTRY; METALLURGY
23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
22characterised by the process of coating
34Sputtering
CPC
C04B 35/457
CCHEMISTRY; METALLURGY
04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE
35Shaped ceramic products characterised by their composition
01based on oxide ceramics
453based on zinc, tin, or bismuth oxides or solid solutions thereof with other oxides, e.g. zincates, stannates or bismuthates
457based on tin oxides or stannates
C04B 35/645
CCHEMISTRY; METALLURGY
04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE
35Shaped ceramic products characterised by their composition
622Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
64Burning or sintering processes
645Pressure sintering
C23C 14/3414
CCHEMISTRY; METALLURGY
23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
22characterised by the process of coating
34Sputtering
3407Cathode assembly for sputtering apparatus, e.g. Target
3414Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
Y10S 264/36
YSECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
10TECHNICAL SUBJECTS COVERED BY FORMER USPC
STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
264Plastic and nonmetallic article shaping or treating: processes
36Processes of making metal-ceramics
Applicants
  • MATERIALS RESEARCH CORPORATION [US/US]; Route 303 Orangeburg, NY 10962, US
Inventors
  • LO, Chi-Fung; US
  • TURN, John; US
  • STRAUSS, David, P.; US
Agents
  • AHRENS, Gregory, F. ; Wood, Herron & Evans 2700 Carew Tower Cincinnati, OH 45202, US
  • LLOYD WISE, TREGEAR & COMPANY; Commonwealth House 1-19 New Oxford Street London WC1A 1LW, GB
Priority Data
08/295,59425.08.1994US
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) APPARATUS AND METHOD FOR MAKING METAL OXIDE SPUTTERING TARGETS
(FR) APPAREIL ET PROCEDE DE FABRICATION DE CIBLES DE PULVERISATION CATHODIQUE EN OXYDE METALLIQUE
Abstract
(EN)
An apparatus and process for making metal oxide sputtering targets from volatile and thermally unstable metal oxide powder (11) by enveloping the metal oxide powder (11) in at least one layer of a barrier material (24) while the powder is hot-pressed using a graphite die assembly (12).
(FR)
Appareil et procédé de fabrication de cibles de pulvérisation cathodique en oxyde métallique à partir de poudre (11) d'oxyde métallique volatil et thermiquement instable. Ledit procédé consiste à envelopper la poudre (11) d'oxyde métallique dans au moins une couche d'un matériau barrière (24) tandis que ladite poudre est pressée à chaud à l'aide d'un ensemble matrice graphite (12).
Also published as
Latest bibliographic data on file with the International Bureau