WIPO logo
Mobile | Deutsch | Español | Français | 日本語 | 한국어 | Português | Русский | 中文 | العربية |
PATENTSCOPE

Search International and National Patent Collections
World Intellectual Property Organization
Search
 
Browse
 
Translate
 
Options
 
News
 
Login
 
Help
 
Machine translation
1. (WO1996006202) APPARATUS AND METHOD FOR MAKING METAL OXIDE SPUTTERING TARGETS
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/1996/006202    International Application No.:    PCT/US1994/013593
Publication Date: 29.02.1996 International Filing Date: 22.11.1994
Chapter 2 Demand Filed:    18.03.1996    
IPC:
C04B 35/457 (2006.01), C04B 35/645 (2006.01), C23C 14/34 (2006.01)
Applicants: MATERIALS RESEARCH CORPORATION [US/US]; Route 303, Orangeburg, NY 10962 (US)
Inventors: LO, Chi-Fung; (US).
TURN, John; (US).
STRAUSS, David, P.; (US)
Agent: AHRENS, Gregory, F.; Wood, Herron & Evans, 2700 Carew Tower, Cincinnati, OH 45202 (US).
LLOYD WISE, TREGEAR & COMPANY; Commonwealth House, 1-19 New Oxford Street, London WC1A 1LW (GB)
Priority Data:
08/295,594 25.08.1994 US
Title (EN) APPARATUS AND METHOD FOR MAKING METAL OXIDE SPUTTERING TARGETS
(FR) APPAREIL ET PROCEDE DE FABRICATION DE CIBLES DE PULVERISATION CATHODIQUE EN OXYDE METALLIQUE
Abstract: front page image
(EN)An apparatus and process for making metal oxide sputtering targets from volatile and thermally unstable metal oxide powder (11) by enveloping the metal oxide powder (11) in at least one layer of a barrier material (24) while the powder is hot-pressed using a graphite die assembly (12).
(FR)Appareil et procédé de fabrication de cibles de pulvérisation cathodique en oxyde métallique à partir de poudre (11) d'oxyde métallique volatil et thermiquement instable. Ledit procédé consiste à envelopper la poudre (11) d'oxyde métallique dans au moins une couche d'un matériau barrière (24) tandis que ladite poudre est pressée à chaud à l'aide d'un ensemble matrice graphite (12).
Designated States: AM, AT, AU, BB, BG, BR, BY, CA, CH, CN, CZ, DE, DK, EE, ES, FI, GB, GE, HU, JP, KE, KG, KP, KR, KZ, LK, LR, LT, LU, LV, MD, MG, MN, MW, NL, NO, NZ, PL, PT, RO, RU, SD, SE, SI, SK, TJ, TT, UA, UZ, VN.
African Regional Intellectual Property Organization (KE, MW, SD, SZ)
European Patent Office (AT, BE, CH, DE, DK, ES, FR, GB, GR, IE, IT, LU, MC, NL, PT, SE)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)