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1. WO1996006201 - APPARATUS AND METHOD FOR MAKING METAL OXIDE SPUTTERING TARGETS

Publication Number WO/1996/006201
Publication Date 29.02.1996
International Application No. PCT/US1994/013398
International Filing Date 22.11.1994
Chapter 2 Demand Filed 18.03.1996
IPC
C04B 35/645 2006.01
CCHEMISTRY; METALLURGY
04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
BLIME; MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
35Shaped ceramic products characterised by their composition; Ceramic compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
622Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
64Burning or sintering processes
645Pressure sintering
C23C 14/34 2006.01
CCHEMISTRY; METALLURGY
23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
22characterised by the process of coating
34Sputtering
CPC
C04B 35/645
CCHEMISTRY; METALLURGY
04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE
35Shaped ceramic products characterised by their composition
622Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
64Burning or sintering processes
645Pressure sintering
C23C 14/3414
CCHEMISTRY; METALLURGY
23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
22characterised by the process of coating
34Sputtering
3407Cathode assembly for sputtering apparatus, e.g. Target
3414Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
Y10S 425/812
YSECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
10TECHNICAL SUBJECTS COVERED BY FORMER USPC
STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
425Plastic article or earthenware shaping or treating: apparatus
812Venting
Applicants
  • MATERIALS RESEARCH CORPORATION [US/US]; Route 303 Orangeburg, NY 10962, US
Inventors
  • LO, Chi-Fung; US
  • TURN, John; US
Agents
  • AHRENS, Gregory, F. ; Wood, Herron & Evans 2700 Carew Tower Cincinnati, OH 45202, US
  • LLOYD WISE TREGEAR & CO.; Norman House 105-109 Strand London WC2R OAE, GB
Priority Data
08/295,59325.08.1994US
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) APPARATUS AND METHOD FOR MAKING METAL OXIDE SPUTTERING TARGETS
(FR) APPAREIL ET PROCEDE DE FABRICATION DE CIBLES DE PULVERISATION CATHODIQUE EN OXYDE METALLIQUE
Abstract
(EN)
An apparatus and process for making metal oxide sputtering targets from volatile and thermally unstable metal oxide powder (11) by hotpressing the metal oxide powder (11) in a graphite die assembly (12) having a ceramic barrier sleeve (24) disposed therein to isolate the metal oxide powder (11) from the graphite die assembly (12) components. To avoid the drawbacks of retaining vapors and gases in the powdered target material during hot-pressing, a gas release device is disposed within the die cavity (19) to minimize the amount of trapped vapor and gas. Heat treating said powdered target starting material prior to loading said material into said die cavity to partially reduce said powder also reduces the amount of vapor and gas retained in the powdered target material during hot-pressing.
(FR)
Appareil et procédé de fabrication de cibles de pulvérisation cathodique en oxyde métallique à partir de poudre (11) d'oxyde métallique volatil et thermiquement instable. Ledit procédé consiste à presser à chaud la poudre (11) d'oxyde métallique dans un ensemble matrice en graphite (12) doté d'un manchon de céramique (24) faisant barrière placé à l'intérieur de ladite matrice pour isoler la poudre (11) d'oxyde métallique des composants de l'ensemble matrice en graphite (12). Pour éviter les inconvénients liés à la rétention de vapeurs et de gaz dans le matériau de cible en poudre pendant la compression à chaud, un dispositif d'évacuation de gaz est placé dans la cavité (19) de la matrice afin de réduire au minimum la quantité de vapeur et de gaz piégés. Le traitement thermique dudit matériau de départ en poudre pour cible avant le chargement dudit matériau dans la cavité de la matrice, destiné à réduire ladite poudre, réduit également la quantité de vapeur et de gaz retenus dans le matériau pour cible en poudre pendant la compression à chaud.
Also published as
Latest bibliographic data on file with the International Bureau