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1. WO1996004652 - PROCESS FOR MANUFACTURING OPTICAL DATA STORAGE DISK STAMPER

Publication Number WO/1996/004652
Publication Date 15.02.1996
International Application No. PCT/US1995/009554
International Filing Date 31.07.1995
Chapter 2 Demand Filed 29.02.1996
IPC
B29C 45/26 2006.01
BPERFORMING OPERATIONS; TRANSPORTING
29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
45Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
17Component parts, details or accessories; Auxiliary operations
26Moulds
B29D 17/00 2006.01
BPERFORMING OPERATIONS; TRANSPORTING
29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
DPRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
17Producing carriers of records containing fine grooves or impressions, e.g. disc records for needle playback or cylinder records; Producing record discs from master stencils
G11B 7/26 2006.01
GPHYSICS
11INFORMATION STORAGE
BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
7Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation, reproducing using an optical beam at lower power; Record carriers therefor
24Record carriers characterised by shape, structure or physical properties, or by the selection of the material 
26Apparatus or processes specially adapted for the manufacture of record carriers
G11B 23/00 2006.01
GPHYSICS
11INFORMATION STORAGE
BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
23Record carriers not specific to the method of recording or reproducing; Accessories, e.g. containers, specially adapted for co-operation with the recording or reproducing apparatus
CPC
B29C 2043/025
BPERFORMING OPERATIONS; TRANSPORTING
29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
43Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
02of articles of definite length, i.e. discrete articles
021characterised by the shape of the surface
023having a plurality of grooves
025forming a microstructure, i.e. fine patterning
B29C 43/003
BPERFORMING OPERATIONS; TRANSPORTING
29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
43Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
003characterised by the choice of material
B29C 43/021
BPERFORMING OPERATIONS; TRANSPORTING
29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
43Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
02of articles of definite length, i.e. discrete articles
021characterised by the shape of the surface
B29C 45/2632
BPERFORMING OPERATIONS; TRANSPORTING
29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
45Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
17Component parts, details or accessories; Auxiliary operations
26Moulds
263with mould wall parts provided with fine grooves or impressions, e.g. for record discs
2632Stampers; Mountings thereof
B29D 17/005
BPERFORMING OPERATIONS; TRANSPORTING
29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
DPRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
17Producing carriers of records containing fine grooves or impressions, e.g. disc records for needle playback, cylinder records
005Producing optically read record carriers, e.g. optical discs
G11B 23/0057
GPHYSICS
11INFORMATION STORAGE
BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
23Record carriers not specific to the method of recording or reproducing; Accessories, e.g. containers, specially adapted for co-operation with the recording or reproducing apparatus ; Intermediate mediums; Apparatus or processes specially adapted for their manufacture
0057Intermediate mediums, i.e. mediums provided with an information structure not specific to the method of reproducing or duplication such as matrixes for mechanical pressing of an information structure
Applicants
  • BIFANO, Thomas, G. [US/US]; US
Inventors
  • BIFANO, Thomas, G.; US
Agents
  • ARPIN, James, B. ; Baker & Botts, L.L.P. The Warner 1299 Pennsylvania Avenue, N.W. Washington, DC 20004, US
Priority Data
08/281,97129.07.1994US
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) PROCESS FOR MANUFACTURING OPTICAL DATA STORAGE DISK STAMPER
(FR) PROCEDE DE FABRICATION D'UNE MATRICE DE DISQUES OPTIQUES NUMERIQUES
Abstract
(EN)
A process for manufacturing an optical data storage disk stamper includes the steps of providing a chemically vapor-deposited, silicon carbide substrate having a toughness of about 4.5 MPa$m(r)m, a roughness of about 1 nm, and a flatness of about 6 $g(m)m and depositing a negative photoresist on a surface of the substrate. The substrate has a diameter greater than about 120 mm and a thickness greater than about one mm. The negative photoresist then is exposed with a laser to form a negative, data pattern in the photoresist. The photoresist is developed, and the ceramic substrate is ion machined to form the data pattern, in the substrate, such that a spiral track of ridges and lands is formed wherein each ridge has a height of about in a range of 20 to 200 nm. After the data pattern has been ion machined into the substrate, the developed photoresist is stripped from the substrate.
(FR)
Un procédé de fabrication d'une matrice de disques optiques numériques comprend les étapes de création d'un substrat en carbure de silicium déposé en phase vapeur par un procédé chimique, ayant une dureté de 4,5 Pa $m(r)m environ, une rugosité d'environ 1 nm et une planéité d'environ 6 $g(m)m, et de dépôt d'une couche photosensible négative à la surface du substrat. Le substrat a un diamètre supérieur à 120 mm et une épaisseur supérieure à un millimètre environ. La couche photosensible négative est ensuite exposée par laser pour former un schéma de données négatif sur la couche photosensible. La couche photosensible est développée et le substrat en céramique est soumis à un usinage ionique pour former le schéma de données dans le substrat, de façon à former une piste en spirales formée de crêtes et de creux dans laquelle chaque crête a une hauteur comprise entre 20 et 200 nm environ. Une fois le schéma de données réalisé par usinage ionique dans le substrat, la couche photosensible développée est enlevée du substrat.
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