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1. WO1996004525 - TWO AXIS NAVIGATION GRADE MICROMACHINED ROTATION SENSOR SYSTEM

Publication Number WO/1996/004525
Publication Date 15.02.1996
International Application No. PCT/US1995/009533
International Filing Date 28.07.1995
Chapter 2 Demand Filed 28.02.1996
IPC
G01C 19/56 2012.01
GPHYSICS
01MEASURING; TESTING
CMEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
19Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
56Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
CPC
G01C 19/5712
GPHYSICS
01MEASURING; TESTING
CMEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
19Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
56Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
5705using masses driven in reciprocating rotary motion about an axis
5712the devices involving a micromechanical structure
G01P 2015/084
GPHYSICS
01MEASURING; TESTING
PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
15Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
02by making use of inertia forces ; using solid seismic masses
08with conversion into electric or magnetic values
0805being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
0822for defining out-of-plane movement of the mass
084the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass
G01P 2015/0842
GPHYSICS
01MEASURING; TESTING
PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
15Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
02by making use of inertia forces ; using solid seismic masses
08with conversion into electric or magnetic values
0805being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
0822for defining out-of-plane movement of the mass
084the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass
0842the mass being of clover leaf shape
Applicants
  • LITTON SYSTEMS, INC. [US/US]; 5500 Canoga Avenue Woodland Hills, CA 91367, US (AllExceptUS)
  • STEWART, Robert, E. [US/US]; US (UsOnly)
  • WYSE, Stanley, F. [US/US]; US (UsOnly)
  • FERSHT, Samuel, H. [US/US]; US (UsOnly)
Inventors
  • STEWART, Robert, E.; US
  • WYSE, Stanley, F.; US
  • FERSHT, Samuel, H.; US
Agents
  • LYNN, John, H.; Suite 1160 3200 Park Center Drive Costa Mesa, CA 92626, US
Priority Data
08/282,75729.07.1994US
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) TWO AXIS NAVIGATION GRADE MICROMACHINED ROTATION SENSOR SYSTEM
(FR) SYSTEME DE CAPTEUR DE ROTATION MICRO-USINE A DEUX AXES POUR NAVIGATION
Abstract
(EN)
A two axis closed loop angular rate sensor which provides a digital delta theta output signal. A drive member is formed of a single, silicon wafer having a pair of oppositely-facing planar surfaces. The drive member includes a frame and a drive member central portion connected to the frame and arranged to have rotational compliance between the frame and the central portion about an axis perpendicular to the planar surfaces of the silicon wafer. Drive signals are applied to a plurality of electrodes on the central portion to cause rotational oscillation of the drive member central portion about a drive axis perpendicular to the planar surfaces of the silicon wafer. A silicon sensing member is connected to the drive member. The sensing member has a central support member connected to the drive member central portion such that rotational oscillations of the drive member central portion are transmitted to the sensing member central portion. A sensing portion is connected to the sensing member central support member to allow the sensing portion to oscillate about the drive axis and to allow an input rotation rate about an axis perpendicular to the drive axis to produce out-of-plane oscillations of the sensing portions. Signal processing apparatus is connected to the sensing portion for producing a signal indicative of the input rotational rate as a function of the amplitude of the out-of-plane oscillations of the sensing portion.
(FR)
Capteur de valeur angulaire en boucle fermée à deux axes, produisant un signal de sortie numérique delta-théta. Un organe d'entraînement se compose d'une seule plaquette de silicium pourvue d'une paire de surfaces planes opposées. Il comporte un cadre et une partie centrale de l'organe d'entraînement, reliée au cadre et disposée de façon à assurer une compliance en rotation entre le cadre et la partie centrale, autour d'un axe perpendiculaire aux surfaces planes de la plaquette de silicium. Des signaux d'activation sont appliqués à une pluralité d'électrodes disposées sur la partie centrale afin de provoquer une oscillation en rotation de la partie centrale de l'organe d'entraînement autour d'un axe d'entraînement perpendiculaire aux surfaces planes de la plaquette de silicium. Un organe de détection en silicium est connecté à l'organe d'entraînement. Il possède un élément de support central relié à la partie centrale de l'organe d'entraînement de telle sorte que les oscillation en rotation de la partie centrale soient transmises à la partie centrale de l'organe de détection. Une partie de détection est connectée à l'élément de support central de l'organe de détection afin de permettre l'oscillation de la partie de détection autour de l'axe d'entraînement et de permettre qu'une valeur de rotation d'entrée autour d'un axe perpendiculaire à l'axe d'entraînement occasionne des oscillations des parties de détection en-dehors du plan. Un appareil de traitement des signaux est connecté à la partie de détection afin de produire un signal indiquant la valeur de rotation d'entrée en fonction de l'amplitude des oscillations hors du plan de la partie de détection.
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