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1. WO1996003789 - DISCHARGE ARRANGEMENT FOR PULSED GAS LASERS

Publication Number WO/1996/003789
Publication Date 08.02.1996
International Application No. PCT/EP1995/002870
International Filing Date 20.07.1995
Chapter 2 Demand Filed 31.01.1996
IPC
H01S 3/038 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
3Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
02Constructional details
03of gas laser discharge tubes
038Electrodes, e.g. special shape, configuration or composition
H01S 3/0971 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
3Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
09Processes or apparatus for excitation, e.g. pumping
097by gas discharge of a gas laser
0971transversely excited
CPC
H01S 3/0384
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
3Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
02Constructional details
03of gas laser discharge tubes
038Electrodes, e.g. special shape, configuration or composition
0384Auxiliary electrodes, e.g. for pre-ionisation or triggering, or particular adaptations therefor
H01S 3/0385
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
3Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
02Constructional details
03of gas laser discharge tubes
038Electrodes, e.g. special shape, configuration or composition
0385Shape
H01S 3/0388
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
3Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
02Constructional details
03of gas laser discharge tubes
038Electrodes, e.g. special shape, configuration or composition
0388Compositions, materials or coatings
H01S 3/09716
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
3Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
09Processes or apparatus for excitation, e.g. pumping
097by gas discharge of a gas laser
0971transversely excited
09713with auxiliary ionisation, e.g. double discharge excitation
09716by ionising radiation
Applicants
  • ATL LASERTECHNIK & ACCESSOIRES GMBH [DE/DE]; Rudower Chaussee 6 D-12489 Berlin, DE (AllExceptUS)
  • OSMANOW, Rustem [DE/DE]; DE (UsOnly)
Inventors
  • OSMANOW, Rustem; DE
Agents
  • HAGEMANN, Heinrich ; Hagemann & Kehl Postfach 860 329 D-81630 München, DE
Priority Data
P 44 26 723.122.07.1994DE
Publication Language German (DE)
Filing Language German (DE)
Designated States
Title
(DE) ENTLADUNGSANORDNUNG FÜR IMPULSGASLASER
(EN) DISCHARGE ARRANGEMENT FOR PULSED GAS LASERS
(FR) SYSTEME DE DECHARGE POUR LASERS A GAZ IMPULSIONNELS
Abstract
(DE)
Beschrieben wird eine Entladungsanordnung (1) für Impulsgaslaser, wobei Laserelektroden (8, 9) angeordnet sind, in deren Zwischenraum (15) mittels einer mindestens einseitigen Anordnung (2, 3, 4) zur Erzeugung von Entladungen mit intensiver UV-Emission, mittels deren eine Vorionisation der Zwischenräume (15) zwischen den Laserelektroden (8, 9) erzeugt wird. Die Erfindung ist im wesentlichen dadurch gekennzeichnet, daß die Anordung (2, 3, 4) von mindestens einer stabförmigen Elektrode (2) gebildet ist, die von einem isolierenden, vorzugsweise keramischen Material (4) umgeben ist und die einen leitenden Kontakt (5) zur Oberfläche (6) des isolierenden, keramischen Materials (4) aufweist und daß auf dieser Oberfläche (6) wenigstens eine Gegenelektrode (7) in Abstand zur stabförmigen Elektrode (2) angeordnet ist, die mit einer der Laserelektroden (8) leitend verbunden ist, wobei sich zwischen der stabförmigen Elektrode (2) und der Gegenelektrode (7) Gleitentladungsstrecken (13) ausbilden. Es wurde eine Entladungsanordnung (1) geschaffen, die eine deutlich gesteigerte Effektivität der Laserstrahlerzeugung ermöglicht und die Lebensdauer der Komponenten und der Gasfüllung des Lasers verlängert.
(EN)
The description relates to a discharge arrangement (1) for pulsed gas lasers in which there are laser electrodes (8, 9) in the space (15) between which discharges with intense u/v emission are produced by an arrangement on at least one side, by means of which the space (15) between the laser electrodes (8, 9) is pre-ionised. Essentially in the invention, the arrangement (2, 3, 4) consists of at least one rod electrode (2) which is surrounded by an insulating, preferably ceramic, material (4) and has a conductive contact (5) with the surface (6) of insulating ceramic material (4) and on this surface (6) there is at least one counter-electrode (7) spaced from the rod electrode (2) which is conductively connected to one of the laser electrodes (8), whereby sliding discharge paths (13) are formed between the rod electrode (2) and the counter-electrode (7). This provides a discharge arrangement (1) making the laser beam generation markedly more effective and lengthening the useful life of the components and gas filling of the laser.
(FR)
L'invention concerne un système de décharge (1) pour lasers à gaz impulsionnels comprenant des électrodes laser (8, 9), dans l'espace intermédiaire (15) desquels il est prévu un système (2, 3, 4) situé au moins d'un côté et servant à produire des décharges à émission intense d'U.V., qui entraîne une pré-ionisation des espaces intermédiaires (15) situés entre les électrodes laser (8, 9). L'invention se caractérise essentiellement en ce que le système (2, 3, 4) se compose d'au moins une électrode (2) se présentant sous forme de barre, entourée d'un matériau isolant, de préférence céramique, et comportant un contact (5) conducteur en direction de la surface (6) du matériau céramique (4) isolant. Au niveau de cette surface (6), il est prévu au moins une contre-électrode (7) placée à distance de l'électrode (2) en forme de barre, qui est reliée de manière conductrice à une des électrodes laser (8), et des sections de décharge glissante (13) se forment entre l'électrode (2) en forme de barre et la contre-électrode (7). Le système de décharge (1) ainsi obtenu permet de produire des faisceaux laser nettement plus efficaces et de prolonger la durée de vie des éléments constitutifs et du remplissage de gaz du laser.
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