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1. WO1996003629 - PROTECTIVE DIAPHRAGM FOR A SILICON PRESSURE SENSOR

Publication Number WO/1996/003629
Publication Date 08.02.1996
International Application No. PCT/DE1995/000907
International Filing Date 11.07.1995
Chapter 2 Demand Filed 02.01.1996
IPC
G01L 9/00 2006.01
GPHYSICS
01MEASURING; TESTING
LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
9Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
CPC
G01L 19/0084
GPHYSICS
01MEASURING; TESTING
LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
19Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
0061Electrical connection means
0084to the outside of the housing
G01L 19/0645
GPHYSICS
01MEASURING; TESTING
LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
19Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
06Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
0627Protection against aggressive medium in general
0645using isolation membranes, specially adapted for protection
G01L 19/143
GPHYSICS
01MEASURING; TESTING
LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
19Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
14Housings
142Multiple part housings
143Two part housings
G01L 19/147
GPHYSICS
01MEASURING; TESTING
LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
19Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
14Housings
147Details about the mounting of the sensor to support or covering means
Applicants
  • SIEMENS AKTIENGESELLSCHAFT [DE/DE]; Wittelsbacherplatz 2 D-80333 München, DE (AllExceptUS)
  • BAUER, Peter [DE/DE]; DE (UsOnly)
  • FRIMBERGER, Manfred [DE/DE]; DE (UsOnly)
  • PFAU, Lorenz [DE/DE]; DE (UsOnly)
  • DIRMEYER, Josef [DE/DE]; DE (UsOnly)
  • EHRLER, Günter [DE/DE]; DE (UsOnly)
Inventors
  • BAUER, Peter; DE
  • FRIMBERGER, Manfred; DE
  • PFAU, Lorenz; DE
  • DIRMEYER, Josef; DE
  • EHRLER, Günter; DE
Priority Data
P 44 25 921.221.07.1994DE
Publication Language German (DE)
Filing Language German (DE)
Designated States
Title
(DE) SCHUTZMEMBRAN FÜR EINEN SILIZIUMDRUCKSENSOR
(EN) PROTECTIVE DIAPHRAGM FOR A SILICON PRESSURE SENSOR
(FR) MEMBRANE PROTECTRICE POUR DETECTEUR DE PRESSION AU SILICIUM
Abstract
(DE)
Die Erfindung betrifft eine Schutzmembrane für Siliziumdrucksensoren, mit der der Siliziumchip und seine elektrischen Anschlußstrukturen gegen schädliche Umwelteinflüsse abgeschirmt werden können, wobei die Membran in ihrem äußeren Umfang eine Sicke aufweist, mit der Temperatur- und Druckspannungen ausgeglichen werden können und mit der die Trägheit der Membran beeinflußbar ist.
(EN)
The invention relates to a protective diaphragm for silicon pressure sensors to protect the silicon chip and its electrical connections against damaging environmental influences. The diaphragm has a bead on its outer periphery by means of which temperature and pressure stresses can be balanced and the inertia of the diaphragm can be influenced.
(FR)
L'invention concerne une membrane protectrice pour détecteurs de pression au silicium, qui permet de mettre la micropastille de silicium et ses structures électriques de raccordement à l'abri des influences néfastes de l'environnement. La membrane comporte dans sa périphérie extérieure, un bourrelet qui permet de compenser les contraintes thermiques et les contraintes de compression et d'influer sur la force d'inertie de la membrane.
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