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1. WO1996002328 - CONVEYOR CASSETTE FOR WAFERS

Publication Number WO/1996/002328
Publication Date 01.02.1996
International Application No. PCT/US1995/007812
International Filing Date 20.06.1995
Chapter 2 Demand Filed 16.01.1996
IPC
H01L 21/673 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
673using specially adapted carriers
H01L 21/677 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
677for conveying, e.g. between different work stations
CPC
H01L 21/67386
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; ; Apparatus not specifically provided for elsewhere
673using specially adapted carriers ; or holders; Fixing the workpieces on such carriers or holders
6735Closed carriers
67386characterised by the construction of the closed carrier
H01L 21/67712
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; ; Apparatus not specifically provided for elsewhere
677for conveying, e.g. between different workstations
67703between different workstations
67712the substrate being handled substantially vertically
H01L 21/67724
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; ; Apparatus not specifically provided for elsewhere
677for conveying, e.g. between different workstations
67703between different workstations
67724by means of a cart or a vehicule
Y10S 414/136
YSECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
10TECHNICAL SUBJECTS COVERED BY FORMER USPC
STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
414Material or article handling
135Associated with semiconductor wafer handling
136including wafer orienting means
Y10S 414/14
YSECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
10TECHNICAL SUBJECTS COVERED BY FORMER USPC
STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
414Material or article handling
135Associated with semiconductor wafer handling
14Wafer cassette transporting
Applicants
  • MIDDLESEX GENERAL INDUSTRIES, INC. [US/US]; 6 Adele Road Woburn, MA 01801, US
Inventors
  • HORN, George, W.; US
Agents
  • COHEN, Jerry ; Perkins, Smith & Cohen One Beacon Street Boston, MA 02108, US
Priority Data
08/275,00113.07.1994US
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) CONVEYOR CASSETTE FOR WAFERS
(FR) CASSETTE DE TRANSPORT POUR PLAQUETTES DE CIRCUITS INTEGRES
Abstract
(EN)
A cassette (2) or storage box for integrated circuit wafers or memory disks arranged and constructed for directly being placed onto the driven rollers (6) of contaminant free conveyors. The cassettes have a flat canted surface (10) for riding on the rollers. The cant is enough such that the loaded wafers lean against the sides of their individual pockets as the cassette travels. The leaning reduces damaged to the wafers by the vibrations involved with physically moving the cassette.
(FR)
Cassette (2) ou boîte de rangement pour des plaquettes de circuits intégrés ou pour des disques mémoire conçus de manière à être placés directement sur les rouleaux entraînés (6) de dispositifs de transport exempts de contaminants. Ces cassettes possèdent une surface plate et inclinée (10), afin de se déplacer avec les rouleaux. L'inclinaison permet aux plaquettes chargées de s'appuyer contre les côtés de leur logement respectif, simultanément au déplacement de la cassette. Cette inclinaison permet également de limiter les risques de détérioration des plaquettes provoquée par les vibrations accompagnant le déplacement de la cassette.
Also published as
Latest bibliographic data on file with the International Bureau