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1. (WO1994029036) WAFER RETAINING PLATEN AND LIFTING MEANS

Pub. No.:    WO/1994/029036    International Application No.:    PCT/US1994/006708
Publication Date: Dec 22, 1994 International Filing Date: Jun 13, 1994
IPC: H01L 21/687
Applicants: VARIAN ASSOCIATES, INC.
Inventors: FREYTSIS, Avrum
HERTEL, Richard, J.
Title: WAFER RETAINING PLATEN AND LIFTING MEANS
Abstract:
An apparatus for releasably holding a workpiece in semiconductor processing systems such as a batch ion implanter which comprises a linkage mechanism mounted onto the backside of a platen for clamping a wafer (2) against a fence (1A) of a supporting means (1) and a pusher means (11) mounted on a wafer lift means (13) for engagement with a lever mechanism (5, 6, 7, 9, 10, 15) for locking and unlocking the device, and sensing any misclamp of the workpiece.