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1. WO1994004832 - MICRO-MINIATURIZABLE VALVE

Publication Number WO/1994/004832
Publication Date 03.03.1994
International Application No. PCT/EP1993/002269
International Filing Date 24.08.1993
Chapter 2 Demand Filed 25.01.1994
IPC
F15C 5/00 2006.01
FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
15FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
CFLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
5Manufacture of fluid-circuit elements; Manufacture of assemblages of such elements
CPC
F15C 5/00
FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
15FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
CFLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
5Manufacture of fluid circuit elements; Manufacture of assemblages of such elements ; integrated circuits
F16K 2099/0074
FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
99Subject matter not provided for in other groups of this subclass
0073Fabrication methods specifically adapted for microvalves
0074using photolithography, e.g. etching
F16K 2099/008
FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
99Subject matter not provided for in other groups of this subclass
0073Fabrication methods specifically adapted for microvalves
008Multi-layer fabrications
F16K 2099/0094
FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
99Subject matter not provided for in other groups of this subclass
0082Microvalves adapted for a particular use
0094Micropumps
F16K 99/0001
FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
99Subject matter not provided for in other groups of this subclass
0001Microvalves
F16K 99/0005
FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
99Subject matter not provided for in other groups of this subclass
0001Microvalves
0003Constructional types of microvalves; Details of the cutting-off member
0005Lift valves
Applicants
  • FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ANGEWANDTEN FORSCHUNG E.V. [DE]/[DE] (AllExceptUS)
  • ZENGERLE, Roland [DE]/[DE] (UsOnly)
  • RICHTER, Axel [DE]/[DE] (UsOnly)
Inventors
  • ZENGERLE, Roland
  • RICHTER, Axel
Agents
  • SCHOPPE, Fritz
Priority Data
P 42 27 998.424.08.1992DE
Publication Language German (DE)
Filing Language German (DE)
Designated States
Title
(DE) MIKROMINIATURISIERBARES VENTIL
(EN) MICRO-MINIATURIZABLE VALVE
(FR) SOUPAPE MICRO-MINIATURISABLE
Abstract
(DE)
Ein mikrominiaturisierbares Ventil umfaßt eine Druckausgleichskammer (2), ein erstes semiaktives Ventil (3), das zwischen der Druckausgleichskammer (2) und einer ersten Fluidleitung (L1) angeordnet ist und ein zweites semiaktives Ventil (4), das zwischen der Druckausgleichskammer (2) und einer zweiten Fluidleitung (L2) angeordnet ist.
(EN)
A micro-miniaturizable valve has a pressure compensating chamber (2), a first semi-active valve (3) arranged between the pressure compensation chamber (2) and a first fluid line (L1) and a second semi-active valve (4) arranged between the pressure compensation chamber (2) and a second fluid line (L2).
(FR)
Une soupape micro-miniaturisable comprend une chambre (2) d'équilibrage de la pression, une première soupape semi-active (3) située entre la chambre (2) d'équilibrage de la pression et un premier conduit de fluide (L1) et une deuxième soupape semi-active (4) située entre la chambre (2) d'équilibrage de la pression et un deuxième conduit de fluide (L2).
Also published as
Latest bibliographic data on file with the International Bureau