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1. WO1994004599 - POLYMERIC SUBSTRATE WITH POLYMERIC MICROELEMENTS

Publication Number WO/1994/004599
Publication Date 03.03.1994
International Application No. PCT/US1993/007256
International Filing Date 02.08.1993
Chapter 2 Demand Filed 08.12.1993
IPC
B05D 5/00 2006.01
BPERFORMING OPERATIONS; TRANSPORTING
05SPRAYING OR ATOMISING IN GENERAL; APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL
DPROCESSES FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL
5Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures
B05D 7/02 2006.01
BPERFORMING OPERATIONS; TRANSPORTING
05SPRAYING OR ATOMISING IN GENERAL; APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL
DPROCESSES FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL
7Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials
02to macromolecular substances, e.g. rubber
B24B 37/26 2012.01
BPERFORMING OPERATIONS; TRANSPORTING
24GRINDING; POLISHING
BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
37Lapping machines or devices; Accessories
11Lapping tools
20Lapping pads for working plane surfaces
26characterised by the shape of the lapping pad surface, e.g. grooved
B24B 53/00 2006.01
BPERFORMING OPERATIONS; TRANSPORTING
24GRINDING; POLISHING
BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
53Devices or means for dressing or conditioning abrasive surfaces
B24B 53/007 2006.01
BPERFORMING OPERATIONS; TRANSPORTING
24GRINDING; POLISHING
BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
53Devices or means for dressing or conditioning abrasive surfaces
007Cleaning of grinding wheels
B24B 53/017 2012.01
BPERFORMING OPERATIONS; TRANSPORTING
24GRINDING; POLISHING
BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
53Devices or means for dressing or conditioning abrasive surfaces
017Devices or means for dressing, cleaning or otherwise conditioning lapping tools
CPC
B24B 37/26
BPERFORMING OPERATIONS; TRANSPORTING
24GRINDING; POLISHING
BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING
37Lapping machines or devices; Accessories
11Lapping tools
20Lapping pads for working plane surfaces
26characterised by the shape of the lapping pad surface, e.g. grooved
B24B 53/00
BPERFORMING OPERATIONS; TRANSPORTING
24GRINDING; POLISHING
BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING
53Devices or means for dressing or conditioning abrasive surfaces
B24B 53/017
BPERFORMING OPERATIONS; TRANSPORTING
24GRINDING; POLISHING
BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING
53Devices or means for dressing or conditioning abrasive surfaces
017Devices or means for dressing, cleaning or otherwise conditioning lapping tools
B24D 3/28
BPERFORMING OPERATIONS; TRANSPORTING
24GRINDING; POLISHING
DTOOLS FOR GRINDING, BUFFING, OR SHARPENING
3Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
02the constituent being used as bonding agent
20and being essentially organic
28Resins ; or natural or synthetic macromolecular compounds
B24D 3/32
BPERFORMING OPERATIONS; TRANSPORTING
24GRINDING; POLISHING
DTOOLS FOR GRINDING, BUFFING, OR SHARPENING
3Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
02the constituent being used as bonding agent
20and being essentially organic
28Resins ; or natural or synthetic macromolecular compounds
32for porous or cellular structure
B29C 70/58
BPERFORMING OPERATIONS; TRANSPORTING
29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
70Shaping composites, i.e. plastics material comprising reinforcements, fillers or preformed parts, e.g. inserts
58comprising fillers only ; , e.g. particles, powder, beads, flakes, spheres
Applicants
  • RODEL, INC. [US]/[US]
Inventors
  • REINHARDT, Heinz, F.
  • ROBERTS, John, V., H.
  • McCLAIN, Harry, George
  • JENSEN, Elmer, William
  • BUDINGER, William, D.
Agents
  • NADEL, Alan, S.
Priority Data
932,16119.08.1992US
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) POLYMERIC SUBSTRATE WITH POLYMERIC MICROELEMENTS
(FR) SUBSTRAT POLYMERE A MICRO-ELEMENTS POLYMERES
Abstract
(EN)
The present invention relates to an article of manufacture or polishing pad (10) for altering a surface of a workpiece, such as polishing or planarizing a semiconductor device. The article includes a polymeric matrix (14) impregnated with a plurality of polymeric microelements (16), each polymeric microelement having a void space (22) therein. The article has a work surface (18) and a subsurface proximate to the work surface. When the article is in contact with a working environment, polymeric microelements (16) at the work surface of the article are less rigid than polymeric elements embedded in the surface. As the work surface of the article is abraded during use, the work surface of the pad may be continuously regenerated. In alternative preferred embodiments, the work surface may further include a minitexture and/or a macrotexture.
(FR)
La présente invention se rapporte à un article de fabrication ou à un disque de polissage (10) servant à modifier la surface d'une pièce, et utilisé notamment pour polir ou aplanir un dispositif semi-conducteur. L'article comprend une matrice polymère (14) imprégnée d'une multiplicité de micro-éléments polymères (16), chacun de ces micro-éléments comprenant un espace vide (22). L'article présente une surface de travail (18) et une surface inférieure adjacente à la surface de travail. Lorsque l'article est mis en contact avec une pièce, les micro-éléments polymères (16) au niveau de la surface de travail sont moins rigides que ceux qui sont incorporés dans la surface inférieure. Lorsque la surface de travail de l'article est soumise à l'usure en cours d'utilisation, la surface de travail du disque peut être régénérée de façon continue. Selon des variantes préférées, la surface de travail peut présenter en outre une microtexture et/ou une macrotexture.
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