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Machine translation
1. (WO1993021663) PROCESS FOR LIFT-OFF OF THIN FILM MATERIALS FROM A GROWTH SUBSTRATE
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/1993/021663    International Application No.:    PCT/US1993/003244
Publication Date: 28.10.1993 International Filing Date: 07.04.1993
Chapter 2 Demand Filed:    29.10.1993    
IPC:
H01L 21/20 (2006.01), H01L 21/78 (2006.01), H01L 27/146 (2006.01), H01L 33/00 (2006.01), H01S 5/02 (2006.01), H01S 5/183 (2006.01)
Applicants: GEORGIA TECH RESEARCH CORPORATION [US/US]; 400 Tenth Street, Centennial Research Building, Atlanta, GA 30332-0415 (US)
Inventors: JOKERST, Nan, Marie; (US).
BROOKE, Martin, Anthony; (US).
ALLEN, Mark, George; (US)
Agent: HORSTEMEYER, Scott, A.; Hopkins & Thomas, 100 Galleria Parkway, N.W., Suite 1550, Atlanta, GA 30339 (US)
Priority Data:
07/865,126 08.04.1992 US
07/865,379 08.04.1992 US
Title (EN) PROCESS FOR LIFT-OFF OF THIN FILM MATERIALS FROM A GROWTH SUBSTRATE
(FR) PROCEDE D'ARRACHEMENT DE MATERIAUX EN COUCHE MINCE D'UN SUBSTRAT DE CROISSANCE
Abstract: front page image
(EN)Various novel lift-off and bonding processes (60, 80, 100) permit lift-off of thin film materials and devices (68), comprising In¿x?Ga¿1-x?As¿y?P¿1-y? where 0
(FR)L'invention concerne divers nouveaux procédés d'arrachement et de collage (60, 80, 100) qui permettent d'arracher des matériaux et des composants en couche mince constitués de In¿x?Ga¿1-x?As¿y?P¿1-y? où 0
Designated States: CA, JP.
European Patent Office (AT, BE, CH, DE, DK, ES, FR, GB, GR, IE, IT, LU, MC, NL, PT, SE).
Publication Language: English (EN)
Filing Language: English (EN)