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Machine translation
1. (WO1993019888) REMOVAL OF SURFACE CONTAMINANTS BY IRRADIATION
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/1993/019888    International Application No.:    PCT/US1993/002734
Publication Date: 14.10.1993 International Filing Date: 24.03.1993
Chapter 2 Demand Filed:    12.10.1993    
IPC:
B08B 7/00 (2006.01), B23K 26/14 (2006.01), G03F 7/20 (2006.01), H01L 21/00 (2006.01), H01L 21/268 (2006.01), H01L 21/306 (2006.01), H01L 21/3205 (2006.01), H01L 21/321 (2006.01), H01L 21/768 (2006.01)
Applicants: CAULDRON LIMITED PARTNERSHIP [US/US]; 4405 East West Highway, Suite 512, Bethesda, MD 20814 (US) (For All Designated States Except US).
ENGELSBERG, Audrey, C. [US/US]; (US) (For US Only).
DEHAIS, Joseph, A. [US/US]; (US) (For US Only)
Inventors: ENGELSBERG, Audrey, C.; (US).
DEHAIS, Joseph, A.; (US)
Agent: DEGRANDI, Joseph, A.; Beveridge, DeGrandi, Weilacher & Young, Suite 800, 1850 M Street, N.W., Washington, DC 20036 (US).
RODGERS, Dennis, C.; Beveridge, DeGrandi, Weilacher & Young, 1850 M Street, N.W., Suite 800, Washington, DC 20036 (US)
Priority Data:
07/865,039 31.03.1992 US
Title (EN) REMOVAL OF SURFACE CONTAMINANTS BY IRRADIATION
(FR) ENLEVEMENT DE CONTAMINANTS DE SURFACE PAR IRRADIATION
Abstract: front page image
(EN)An apparatus for removing surface contaminants from a planar or irregularly shaped surface of a substrate (12, 70) by high-energy irradiation is provided. The invention enables removal of surface contaminants without altering the underlying molecular crystal structure of the substrate (12, 70). The source of high-energy irradiation includes a pulsed or continuous wave laser (14) or high-energy lamp (59).
(FR)Appareil permettant d'éliminer des contaminants de la surface d'un substrat (12, 70) plan ou de forme irrégulière par irradiation à haute intensité. L'invention permet d'éliminer des contaminants de la surface sans altérer la structure cristalline moléculaire sous-jacente du substrat (12, 70). La source d'irradiation de haute intensité consiste en un laser (14) à impulsions ou à ondes continues ou en une lampe (59) à forte intensité.
Designated States: AT, AU, BB, BG, BR, BY, CA, CH, CZ, DE, DK, ES, FI, GB, GE, HU, JP, KP, KR, KZ, LK, LU, MG, MN, MW, NL, NO, NZ, PL, PT, RO, RU, SD, SE, SK, UA, US, UZ, VN.
European Patent Office (AT, BE, CH, DE, DK, ES, FR, GB, GR, IE, IT, LU, MC, NL, PT, SE)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)