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Machine translation
1. (WO1992011498) VAPOR DEVICE AND METHOD FOR DRYING ARTICLES SUCH AS SEMICONDUCTOR WAFERS WITH SUBSTANCES SUCH AS ISOPROPYL ALCOHOL
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/1992/011498    International Application No.:    PCT/US1990/007366
Publication Date: 09.07.1992 International Filing Date: 17.12.1990
Chapter 2 Demand Filed:    10.07.1992    
IPC:
F26B 5/04 (2006.01), F26B 21/14 (2006.01), H01L 21/00 (2006.01)
Applicants: SEMIFAB INCORPORATED [US/US]; 307 Fallon Road, Hollister, CA 95023 (US)
Inventors: ROBERSON, Glenn, Alvin; (US).
EGLINTON, Robert, Bruce; (US)
Agent: PAUL, James, W.; Fulwider, Patton, Lee & Utecht, 10877 Wilshire Blvd., 10th Floor, Los Angeles, CA 90024 (US)
Priority Data:
Title (EN) VAPOR DEVICE AND METHOD FOR DRYING ARTICLES SUCH AS SEMICONDUCTOR WAFERS WITH SUBSTANCES SUCH AS ISOPROPYL ALCOHOL
(FR) PROCEDE ET APPAREIL A VAPEUR PERMETTANT DE SECHER DES ARTICLES TELS QUE DES TRANCHES DE SEMI-CONDUCTEURS, AVEC DES SUBSTANCES TELLES QUE DE L'ALCOOL ISOPROPYLIQUE
Abstract: front page image
(EN)A device for drying articles such as semiconductor wafers (36) comprising a vacuum process chamber (10) for holding articles to be dried; a vapor generator (38) substantially isolated from the process chamber for supplying a substance such as isopropyl alcohol in vapor form to the process chamber; a heater (46) for heating the walls of the process chamber to discourage the substance vapor from condensing on the inside walls of the process chamber. The device can also be used for rinsing and cleansing articles prior to drying.
(FR)Appareil servant à sécher des articles tels que des tranches de semi-conducteurs (36), comprenant une chambre de traitement par la vapeur (10) supportant les articles devant être séchés; un générateur de vapeur (38) sensiblement éloigné de la chambre de traitement et distribuant à cette dernière une substance telle que de l'alcool isopropylique sous forme de vapeur; un dispositif de chauffage (46) chauffant les parois de la chambre de traitement pour éviter la condensation de la substance se trouvant à l'état gazeux, sur les parois internes de la chambre de traitement. On peut également utiliser cet appareil pour rincer et nettoyer des articles avant de les sécher.
Designated States: AT, AU, BB, BG, BR, CA, CH, DE, DK, ES, FI, GB, GR, HU, JP, KP, KR, LK, LU, MC, MG, MW, NL, NO, RO, SD, SE, SU.
European Patent Office (AT, BE, CH, DE, DK, ES, FR, GB, GR, IT, LU, NL, SE)
African Intellectual Property Organization (BF, BJ, CF, CG, CM, GA, ML, MR, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)