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1. (WO1992010729) MICRODEVICE FOR SENSING OR APPLYING A FORCE AND METHOD OF MAKING THE SAME
Latest bibliographic data on file with the International Bureau

Pub. No.: WO/1992/010729 International Application No.: PCT/US1991/009423
Publication Date: 25.06.1992 International Filing Date: 12.12.1991
Chapter 2 Demand Filed: 10.07.1992
IPC:
G01L 1/16 (2006.01) ,H01L 41/24 (2006.01)
G PHYSICS
01
MEASURING; TESTING
L
MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
1
Measuring force or stress, in general
16
using properties of piezo-electric devices
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
41
Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
22
Processes or apparatus specially adapted for the assembly, manufacture or treatment of piezo-electric or electrostrictive devices or of parts thereof
24
of elements of ceramic composition
Applicants:
REGENTS OF THE UNIVERSITY OF MINNESOTA [US/US]; 568 Administrative Services Center 1919 University Avenue St. Paul, MN 55104, US
Inventors:
POLLA, Dennis, L.; US
TAMAGAWA, Takashi; US
Agent:
ELLINGER, Mark, S. ; Patterson & Keough 615 Peavey Building 730 Second Avenue South Minneapolis, MN 55402, US
Priority Data:
626,71212.12.1990US
Title (EN) MICRODEVICE FOR SENSING OR APPLYING A FORCE AND METHOD OF MAKING THE SAME
(FR) MICRO-DISPOSITIF DE DETECTION OU D'APPLICATION D'UNE FORCE ET SON PROCEDE DE FABRICATION
Abstract:
(EN) A microsensor or micromechanical device based upon the piezoelectric properties of thin film lead zirconate titanate (PZT) with a thickness of between 0.1 and 5 microns. The thin film PZT (11) is sandwiched between first and second electrodes (10, 12) which are provided with electrical connection means (14, 15) for electrically connecting the electrodes to a voltage sensor or voltage source (16). The invention also relates to a method for making such microsensor or micromechanical device.
(FR) Dispositif de micro-détection ou micro-mécanique basé sur les propriétés piézoélectriques du titane de zirconate (PZT) à fils conducteurs à couche mince d'une épaisseur comprise entre 0,1 et 5 microns. Le PZT en couche mince (11) est pris en sandwich entre des première et seconde électrodes (10, 12), lesquelles sont dotées de moyens de connexion électrique (14, 15) permettant de relier électriquement les électrodes à un capteur de tension ou à une source de tension (16). L'invention concerne également un procédé de fabrication dudit dispositif de micro-détection ou micro-mécanique.
Designated States: JP
European Patent Office (AT, BE, CH, DE, DK, ES, FR, GB, GR, IT, LU, MC, NL, SE)
Publication Language: English (EN)
Filing Language: English (EN)
Also published as:
EP0562031JPH06503423