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1. (WO1992010076) PLASMA STABILIZER
Latest bibliographic data on file with the International Bureau

Pub. No.: WO/1992/010076 International Application No.: PCT/JP1991/001617
Publication Date: 11.06.1992 International Filing Date: 26.11.1991
IPC:
H05H 1/00 (2006.01) ,H05H 1/46 (2006.01)
H ELECTRICITY
05
ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
H
PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY- CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
1
Generating plasma; Handling plasma
H ELECTRICITY
05
ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
H
PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY- CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
1
Generating plasma; Handling plasma
24
Generating plasma
46
using applied electromagnetic fields, e.g. high frequency or microwave energy
Applicants:
NICHIMEN KABUSHIKI KAISHA [JP/JP]; 2-2, Nakanoshima 2-chome Kita-ku Osaka-shi Osaka 530, JP (AllExceptUS)
NIHON KOSYUHA KABUSHIKI KAISHA [JP/JP]; 1119, Nakayama-cho Midori-ku Yokohama-shi Kanagawa 226, JP (AllExceptUS)
SHINOHARA, Kibatsu [JP/JP]; JP (UsOnly)
OBARA, Kozo [JP/JP]; JP (UsOnly)
UMEZAWA, Tsuku [JP/JP]; JP (UsOnly)
Inventors:
SHINOHARA, Kibatsu; JP
OBARA, Kozo; JP
UMEZAWA, Tsuku; JP
Agent:
KAN, Naoto ; 6th Floor, Kimura Bldg. 11-12, Yoyogi 2-chome Shibuya-ku Tokyo 151, JP
Priority Data:
2/32826228.11.1990JP
Title (EN) PLASMA STABILIZER
(FR) STABILISATEUR DE PLASMA
Abstract:
(EN) A plasma stabilizer having a circuit for measuring the electron temperature and electron density of a plasma by a triple probe, a circuit for controlling the plasma pressure and a circuit for controlling the power for exciting a plasma. A stable plasma is generated automatically by controlling automatically at least one of the plasma pressure and the power for exciting the plasma. In a conventional high frequency plasma device, since the high frequency or microwave power and the gas pressure are adjusted manually, the device cannot follow up the variations of the power and pressure automatically.
(FR) Stabilisateur de plasma possédant un circuit destiné à mesurer la température des électrons et la densité des électrons d'un plasma au moyen d'une triple sonde, un circuit de régulation de la pression d'un plasma et un circuit de régulation du courant d'excitation d'un plasma. Un plasma stable est généré automatiquement par la régulation automatique d'au moins soit la pression du plasma, soit le courant d'excitation du plasma. Dans un dispositif à plasma à haute fréquence traditionnel, étant donné que le courant de haute fréquence ou d'hyperfréquence et la pression gazeuse sont réglées manuellement, le dispositif ne peut pas s'adapter automatiquement aux variations du courant et de la pression.
Designated States: US
European Patent Office (AT, BE, CH, DE, DK, ES, FR, GB, GR, IT, LU, NL, SE)
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)
Also published as:
US5365147