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1. (WO1992009934) PHOTOSENSITIVE MATERIALS
Latest bibliographic data on file with the International Bureau

Pub. No.: WO/1992/009934 International Application No.: PCT/US1991/006543
Publication Date: 11.06.1992 International Filing Date: 12.09.1991
Chapter 2 Demand Filed: 25.06.1992
IPC:
G03F 7/038 (2006.01) ,G03F 7/039 (2006.01)
G PHYSICS
03
PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
F
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
7
Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
004
Photosensitive materials
038
Macromolecular compounds which are rendered insoluble or differentially wettable
G PHYSICS
03
PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
F
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
7
Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
004
Photosensitive materials
039
Macromolecular compounds which are photodegradable, e.g. positive electron resists
Applicants:
MINNESOTA MINING AND MANUFACTURING COMPANY [US/US]; 3M Center Post Office Box 33427 Saint Paul, MN 55133-3427, US
Inventors:
VOGEL, Dennis, E.; US
STOFKO, John, J., Jr.; US
Agent:
EVEARITT, Gregory, A. ; Office of Intellectual Property Counsel Minnesota Mining and Manufacturing Company P.O. Box 33427 Saint Paul, MN 55133-3427, US
Priority Data:
618,21326.11.1990US
Title (EN) PHOTOSENSITIVE MATERIALS
(FR) MATIERES PHOTOSENSIBLES
Abstract:
(EN) Photosensitive compositions containing a photoinitiator which generates an acid upon exposure to light and a polymer containing pendant alkoxy alkyl ester groups. Also disclosed are imageable articles containing the photosensitive compositions of the present invention coated on a substrate as well as processes for forming an imaged article.
(FR) Compositions photosensibles contenant une photoamorce qui génère un acide lorsqu'elle est exposée à la lumière; et un polymère contenant des groupes d'ester alcoxy alkyle pendants. On décrit aussi des articles servant à la prise de vues qui contiennent les compositions photosensibles de la présente invention, lesdites compositions étant appliquées sur un substrat. On décrit en outre des procédés pour la formation d'un article comportant des images.
Designated States: CA, JP, KR
European Patent Office (AT, BE, CH, DE, DK, ES, FR, GB, GR, IT, LU, NL, SE)
Publication Language: English (EN)
Filing Language: English (EN)
Also published as:
EP0559660JPH06502260CA2094906KR1019930702705