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1. (WO1992009408) MANIPULATOR SYSTEM, ESPECIALLY FOR USE IN CLEAN ROOMS
Latest bibliographic data on file with the International Bureau

Pub. No.: WO/1992/009408 International Application No.: PCT/DE1991/000921
Publication Date: 11.06.1992 International Filing Date: 22.11.1991
Chapter 2 Demand Filed: 14.05.1992
IPC:
B25J 15/00 (2006.01) ,B25J 15/02 (2006.01) ,B65G 47/90 (2006.01)
B PERFORMING OPERATIONS; TRANSPORTING
25
HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; HANDLES FOR HAND IMPLEMENTS; WORKSHOP EQUIPMENT; MANIPULATORS
J
MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
15
Gripping heads
B PERFORMING OPERATIONS; TRANSPORTING
25
HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; HANDLES FOR HAND IMPLEMENTS; WORKSHOP EQUIPMENT; MANIPULATORS
J
MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
15
Gripping heads
02
servo-actuated
B PERFORMING OPERATIONS; TRANSPORTING
65
CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
G
TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
47
Article or material-handling devices associated with conveyers; Methods employing such devices
74
Feeding, transfer, or discharging devices of particular kinds or types
90
Devices for picking-up and depositing articles or materials
Applicants:
FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ANGEWANDTEN FORSCHUNG E.V. [DE/DE]; Leonrodstraße 54 D-80636 München, DE (AllExceptUS)
HÄGELE, Martin [DE/DE]; DE (UsOnly)
Inventors:
HÄGELE, Martin; DE
Agent:
MÜNICH, Wilhelm; Münich, Steinmann, Schiller Willibaldstr. 36 D-8000 München 21, DE
Priority Data:
P 40 37 204.922.11.1990DE
Title (DE) GREIFERSYSTEM, INSBESONDERE ZUR REINRAUMANWENDUNG
(EN) MANIPULATOR SYSTEM, ESPECIALLY FOR USE IN CLEAN ROOMS
(FR) SYSTEME DE PREHENSION, UTILE NOTAMMENT EN SALLE BLANCHE
Abstract:
(DE) Beschrieben wird ein Greifersystem, insbesondere zur Reinraumanwendung, mit einem Grundteil, der an einer Handhabungseinrichtung oder dgl. anbringbar ist, und an dem zwei Greiferbacken gehalten sind, die einen Linearteil (2, 2') aufweisen, der in dem Grundteil (1) in Richtung seiner Längsachse verschiebbar gelagert ist, so daß die Greiferbacken eine Zustellbewegung zur Handhabung von Wafern, Carriern o. dgl. ausführen können. Die Erfindung zeichnet sich dadurch aus, daß am vorderen Ende jedes Linearteils (2, 2') eine Dreheinheit (4, 8) angebracht ist, deren Welle (11) sich in etwa senkrecht zur Längsachse des Linearteils (2, 2') erstreckt und wenigstens zwei unterschiedliche Greifelemente (13, 14, 16) trägt.
(EN) The description relates to a manipulator, especially for use in clean rooms, with a basic section which can be attached to a handling device or the like and on which there are two manipulating flanges having a linear part (2, 2') which is movable along its longitudinal axis so that the manipulating flanges can perform an adjusting movement for handling wafers, carriers or the like. The invention is noteworthy in that at the forward end of each linear part (2, 2') there is a rotary unit (4, 8), the shaft (11) of which extends almost perpendicularly to the longitudinal axis of the linear part (2, 2') and bears at least two different manipulating components (13, 14, 16).
(FR) Un système de préhension, utilisé notamment en salle blanche, comprend une partie de base qui peut être reliée à un dispositif de manipulation ou similaire et qui porte deux mâchoires de préhension pourvues d'une partie linéaire (2, 2') montée mobile dans la partie de base (1) dans le sens de son axe longitudinal, de sorte que les mâchoires de préhension peuvent effectuer un mouvement d'avance lors de la manipulation de tranches de silicium, supports ou éléments. L'invention se caractérise par le fait qu'une unité rotative (4, 8) est agencée à l'extrémité antérieure de chaque partie linéaire (2, 2') et comprend un arbre (11) à peu près perpendiculaire à l'axe longitudinal de la partie linéaire qui porte au moins deux éléments différents de préhension (13, 14, 16).
Designated States: FI, HU, JP, KP, KR, NO, PL, SU, US
European Patent Office (AT, BE, CH, DE, DK, ES, FR, GB, GR, IT, LU, NL, SE)
Publication Language: German (DE)
Filing Language: German (DE)