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1. (WO1991018414) SINGLE WAFER PROCESSOR APPARATUS
Latest bibliographic data on file with the International Bureau

Pub. No.: WO/1991/018414 International Application No.: PCT/US1991/002817
Publication Date: 28.11.1991 International Filing Date: 24.04.1991
Chapter 2 Demand Filed: 06.12.1991
IPC:
G11B 7/26 (2006.01) ,H01L 21/00 (2006.01) ,H01L 21/687 (2006.01)
G PHYSICS
11
INFORMATION STORAGE
B
INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
7
Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation, reproducing using an optical beam at lower power; Record carriers therefor
24
Record carriers characterised by shape, structure or physical properties, or by the selection of the material 
26
Apparatus or processes specially adapted for the manufacture of record carriers
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21
Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21
Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67
Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
683
for supporting or gripping
687
using mechanical means, e.g. chucks, clamps or pinches
Applicants:
SEMITOOL, INC. [US/US]; 655 W. Reserve Drive Kalispell, MT 59901, US
Inventors:
THOMPSON, Raymon, F.; US
OWCZARZ, Aleksander; US
Agent:
ST. JOHN, Richard, J. ; West 601 Main Avenue Suite 815 Spokane, WA 99201-0679, US
Priority Data:
526,24318.05.1990US
Title (EN) SINGLE WAFER PROCESSOR APPARATUS
(FR) APPAREIL DE TRAITEMENT DE TRANCHES INDIVIDUELLES
Abstract:
(EN) A single wafer processing apparatus includes a portable processing head that can be a portable module or a movable unit mounted to a supporting machine frame. The processing head has movable fingers adapted to grip a wafer. The fingers protrude from a protective wafer plate. Indexing and rotation monitoring assemblies are provided for automation of the wafer processing steps. A complementary processing base includes an upwardly-open bowl that receives a wafer held by the portable processing head. It has a full-diameter movable bottom wall for rapid draining purposes. Liquid and/or gas jets and nozzles supply fluids required within the bowl for processing of wafers.
(FR) Un appareil de traitement de tranches individuelles comprend une tête de traitement portative pouvant être un module portatif ou une unité portative montée sur un cadre de machine de support. La tête de traitement comporte des doigts mobiles adaptés pour saisir une tranche. Les doigts dépassent d'une plaque protectrice de tranche. Des ensembles de contrôle d'indexage et de rotation se chargent de l'automatisation des étapes de traitement de la tranche. Une base de traitement complémentaire comprend une cuvette ouverte vers le haut recevant une tranche maintenue par la tête de traitement portative. Elle présente une paroi inférieure mobile de diamètre total utilisée à des fins de drainage rapide. Des jets et des ajutages de liquide et/ou de gaz acheminent les fluides nécessaires à l'intérieur de la cuvette afin de traiter les tranches.
Designated States: AT, AU, BB, BG, BR, CA, CH, DE, DK, ES, FI, GB, HU, JP, KP, KR, LK, LU, MC, MG, MW, NL, NO, PL, RO, SD, SE, SU
European Patent Office (AT, BE, CH, DE, DK, ES, FR, GB, GR, IT, LU, NL, SE)
African Intellectual Property Organization (BF, BJ, CF, CG, CM, GA, ML, MR, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)
Also published as:
EP0530230AU1991077948