Some content of this application is unavailable at the moment.
If this situation persist, please contact us atFeedback&Contact
1. (WO1991018333) PARTIALLY CONSTRAINED MINIMUM ENERGY STATE CONTROLLER
Latest bibliographic data on file with the International Bureau

Pub. No.: WO/1991/018333 International Application No.: PCT/US1991/003566
Publication Date: 28.11.1991 International Filing Date: 20.05.1991
Chapter 2 Demand Filed: 20.12.1991
IPC:
B23Q 15/22 (2006.01) ,G03F 7/20 (2006.01)
B PERFORMING OPERATIONS; TRANSPORTING
23
MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
Q
DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL, CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
15
Automatic control or regulation of feed movement, cutting velocity or position of tool or work
20
before or after the tool acts upon the workpiece
22
Control or regulation of position of tool or workpiece
G PHYSICS
03
PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
F
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
7
Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
20
Exposure; Apparatus therefor
Applicants:
HAMPSHIRE INSTRUMENTS, INC. [US/US]; 10 Carlson Road Rochester, NY 14610, US
Inventors:
JUDELL, Neil, H.; US
Agent:
BARRON, Harry, W.; 8221 Glades Road, Suite 202 Boca Raton, FL 33434, US
Priority Data:
526,56621.05.1990US
Title (EN) PARTIALLY CONSTRAINED MINIMUM ENERGY STATE CONTROLLER
(FR) UNITE DE COMMANDE DE L'ETAT D'ENERGIE MINIMUM PARTIELLEMENT CONTRAINTE
Abstract:
(EN) A lithographic system (10), having a stepper (16) on a block of granite (12) attached to the ground using isolation legs (32), includes a servo control system (34, 38, 40) for providing signals to a motor (18) associated with the stepper (16) to control its movement. The control system (34, 38, 40) includes means (38, 40) to calculate a filter formula used to generate the control signals, which formula is calculated in response to the initial velocity of the stepper (16) and a certain time between discrete movements, so that a minimum amount of energy is utilized. The filter formula requires that the difference in the velocity of the base (12) and the stepper (16) is zero at the time the stepper (16) reaches the final position. Where time is short, both the base (12) and the stepper (16) initially move with the same velocity and end with the same velocity, and an array processor (40) calculates the time varying filter formula.
(FR) Système lithographique (10) qui possède un dispositif pas-à-pas (16) sur un bloc de granite (12) fixé au sol à l'aide de pieds d'isolation (32), comprenant un système de servocommande (34, 38, 40) destiné à fournir des signaux à un moteur (18) associé au dispositif pas-à-pas (16) pour commander ses mouvements. Le système de commande (34, 38, 40) comporte des dispositifs (38, 40) destinés à calculer une formule de filtrage utilisée pour générer les signaux de commande, ladite formule étant calculée en réponse à la vitesse initiale du dispositif pas-à-pas (16) et à un certain laps de temps entre des mouvements discrets de manière qu'une quantité minimale d'énergie soit utilisée. La formule de filtrage exige que la différence de vitesse entre la base (12) et le dispositif pas-à-pas (16) soit égale à zéro au moment où le dispositif pas-à-pas atteint la position finale. Lorsque le laps de temps est court, la base (12) comme le dispositif pas-à-pas (16) bougent initialement à la même vitesse et terminent à la même vitesse, et un processeur vectoriel (40) calcule la formule de filtrage variant avec le temps.
Designated States: JP, KR
European Patent Office (AT, BE, CH, DE, DK, ES, FR, GB, GR, IT, LU, NL, SE)
Publication Language: English (EN)
Filing Language: English (EN)
Also published as:
JPH05506739KR1019930700893