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1. (WO1991018322) METHOD FOR CONTROL OF PHOTORESIST DEVELOP PROCESSES
Latest bibliographic data on file with the International Bureau

Pub. No.: WO/1991/018322 International Application No.: PCT/US1991/003494
Publication Date: 28.11.1991 International Filing Date: 17.05.1991
IPC:
G03F 7/30 (2006.01)
G PHYSICS
03
PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
F
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
7
Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
26
Processing photosensitive materials; Apparatus therefor
30
Imagewise removal using liquid means
Applicants:
XINIX, INC. [US/US]; 3500-B Thomas Road Santa Clara, CA 95051, US
Inventors:
THOMSON, Mariste, A.; US
Agent:
BENZ, William, H. ; Irell & Manella 545 Middlefield Road Suite 200 Menlo Park, CA 94025, US
Priority Data:
526,63918.05.1990US
Title (EN) METHOD FOR CONTROL OF PHOTORESIST DEVELOP PROCESSES
(FR) PROCEDE DE REGULATION DES PROCESSUS DE DEVELOPPEMENT DE PHOTORESERVES
Abstract:
(EN) A method for the control of photoresist develop processes employing multiple spray-puddle steps in which process changes other than time, such as endpoint are used to determine the length of the spray and puddle steps.
(FR) L'invention se rapporte à un procédé qui sert à réguler les processus de développement d'une photoréserve et qui utilise à cet effet des étapes multiples d'aspersion et de corroyage, dans lesquelles on apporte aux conditions de traitement de la photoréserve des modifications autres que des modifications de temps, par exemple des modifications du point final, afin de déterminer la durée des étapes d'aspersion et de corroyage.
Designated States: JP, KR
European Patent Office (AT, BE, CH, DE, DK, ES, FR, GB, GR, IT, LU, NL, SE)
Publication Language: English (EN)
Filing Language: English (EN)
Also published as:
EP0483349US5292605