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1. (WO1991017429) INSTALLATION FOR THE STUDY OR TRANSFORMATION OF SAMPLE SURFACES IN A VACUUM OR CONTROLLED ATMOSPHERE
Latest bibliographic data on file with the International Bureau

Pub. No.: WO/1991/017429 International Application No.: PCT/FR1991/000378
Publication Date: 14.11.1991 International Filing Date: 07.05.1991
Chapter 2 Demand Filed: 05.12.1991
IPC:
G01B 21/30 (2006.01) ,G01N 21/27 (2006.01) ,G01N 27/00 (2006.01) ,G01Q 30/16 (2010.01) ,G02B 21/24 (2006.01) ,H01J 37/20 (2006.01) ,H01J 37/28 (2006.01)
G PHYSICS
01
MEASURING; TESTING
B
MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
21
Measuring arrangements or details thereof in so far as they are not adapted to particular types of measuring means of the other groups of this subclass
30
for measuring roughness or irregularity of surfaces
G PHYSICS
01
MEASURING; TESTING
N
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21
Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible, or ultra-violet light
17
Systems in which incident light is modified in accordance with the properties of the material investigated
25
Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
27
using photo-electric detection
G PHYSICS
01
MEASURING; TESTING
N
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
27
Investigating or analysing materials by the use of electric, electro-chemical, or magnetic means
G PHYSICS
01
MEASURING; TESTING
Q
SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING-PROBE MICROSCOPY [SPM]
30
Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
08
Means for establishing or regulating a desired environmental condition within a sample chamber
16
Vacuum environment
G PHYSICS
02
OPTICS
B
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
21
Microscopes
24
Base structure
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37
Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
02
Details
20
Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37
Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
26
Electron or ion microscopes; Electron- or ion-diffraction tubes
28
with scanning beams
Applicants:
SPIRAL RECHERCHE ET DEVELOPPEMENT [FR/FR]; 3, rue des Mardors Couternon F-21560 Arc-sur-Tille, FR (AllExceptUS)
GOUDONNET, Jean-Pierre [FR/FR]; FR (UsOnly)
LACROUTE, Yvon [FR/FR]; FR (UsOnly)
Inventors:
GOUDONNET, Jean-Pierre; FR
LACROUTE, Yvon; FR
Agent:
BRUDER, Michel ; Cabinet Michel Bruder 10, rue de la Pépinière F-75008 Paris, FR
GUIU, Claude; Cabinet Claude Guiu 10, rue Paul Thénard F-21000 Dijon, FR
Priority Data:
90/0582310.05.1990FR
Title (EN) INSTALLATION FOR THE STUDY OR TRANSFORMATION OF SAMPLE SURFACES IN A VACUUM OR CONTROLLED ATMOSPHERE
(FR) INSTALLATION POUR L'ETUDE OU LA TRANSFORMATION DE LA SURFACE D'ECHANTILLONS PLACES DANS LE VIDE OU DANS UNE ATMOSPHERE CONTROLEE
Abstract:
(EN) An installation for the study of the surface of samples in a vacuum or controlled atmosphere, of the type comprising a main chamber in which is placed a microscopy stage support for at least one device, known as SXM, for microscopy, spectroscopy or engraving a sample surface, according to a process for carrying out the scanning of said surface using an electrically or light conducting microprobe, said installation being characterized in that the stage support can be disconnected from the main chamber and rotated around a central axis in order for an assembly of SXM devices arranged on the periphery of said stage to be used. The invention is applicable, in particular, to electron scanning tunnelling microscopy and/or spectroscopy, especially in ultrahigh vacuums, optic scanning tunnelling microscopy and/or spectroscopy, or to the engraving of nanometric structures using microlithographic optic and/or electronic processes.
(FR) La présente invention concerne une installation pour l'étude de la surface d'échantillons placés dans le vide ou dans une atmosphère contrôlée, du type comportant une enceinte principale dans laquelle est placée une platine support pour au moins un dispositif, dénommé SXM, destiné à la microscopie, à la spectroscopie ou à la gravure de la surface d'échantillons, suivant un procédé mettant en ÷uvre un balayage de ladite surface par une pointe conductrice de l'électricité ou de la lumière, ladite installation étant caractérisée en ce que la platine support peut être débrayée de l'enceinte principale et tournée sur elle-même autour d'un axe central pour permettre l'utilisation d'un ensemble de dispositifs SXM aménagés à la périphérie de ladite platine. Elle s'applique notamment à la microscopie et/ou la spectroscopie à effet tunnel électronique, notamment dans l'ultravide, à la microscopie et/ou la spectroscopie à effet tunnel optique, ou encore à la gravure de structures nanométriques par des procédés microlithographiques optiques et/ou électroniques.
Designated States: AU, BB, BG, BR, CA, FI, HU, JP, KP, KR, LK, MC, MG, MW, NO, RO, SD, SU, US
European Patent Office (AT, BE, CH, DE, DK, ES, FR, GB, GR, IT, LU, NL, SE)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, ML, MR, SN, TD, TG)
Publication Language: French (FR)
Filing Language: French (FR)
Also published as:
EP0573421US5306918JPH05509398DE000069104069AU1991079641FR2662024