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1. (WO1991017282) DIAMOND-LIKE CARBON MATERIAL PRODUCED BY LASER PLASMA DEPOSITION
Latest bibliographic data on file with the International Bureau

Pub. No.: WO/1991/017282 International Application No.: PCT/US1991/003169
Publication Date: 14.11.1991 International Filing Date: 08.05.1991
Chapter 2 Demand Filed: 09.12.1991
IPC:
C23C 14/06 (2006.01) ,C23C 14/28 (2006.01)
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
06
characterised by the coating material
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
22
characterised by the process of coating
24
Vacuum evaporation
28
by wave energy or particle radiation
Applicants:
BOARD OF REGENTS, THE UNIVERSITY OF TEXAS SYSTEM [US/US]; 201 West 7th Street Austin, TX 78701, US
Inventors:
COLLINS, Carl, B.; US
DAVANLOO, Farzin; US
Agent:
DAFFER, Kevin, L.; Arnold, White & Durkee P.O. Box 4433 Houston, TX 77210, US
Grunecker, Kinkeldey, Stockmair & Partner; Maximillianstrasse 58 8000 Munich 22, DE
Priority Data:
521,69409.05.1990US
Title (EN) DIAMOND-LIKE CARBON MATERIAL PRODUCED BY LASER PLASMA DEPOSITION
(FR) MATIERE DE CARBONE ANALOGUE AU DIAMANT PRODUITE PAR DEPOT DE PLASMA AU LASER
Abstract:
(EN) A method and apparatus are disclosed for producing amorphic or ultra fine-grained, diamond-like material on a substrate. Uniform, high quality dehydrogenated diamond-like material is produced when a hardened target material is used and/or when a laser beam strikes the target at non-perpendicular angles of incidence. Also, selective placement of particles upon a substrate as well as simultaneous cleaning of the substrate is achieved by a secondary electrode placed within the laser beam path of travel between a first electrode and the substrate.
(FR) Procédé et appareil de production d'une matière amorphe ou d'un grain ultra-fin analogue au diamant sur un substrat. On produit une matière uniforme déshydrogénée de haute qualité analogue au diamant lorsque l'on utilise une matière cible durcie et/ou lorsqu'un faisceau laser heurte la cible à des angles d'incidence non perpendiculaires. De plus, l'on parvient à obtenir une mise en place sélective de particules sur un substrat ainsi qu'un nettoyage simultané à l'aide d'une électrode secondaire placée dans le chemin de déplacement du faisceau laser entre une première électrode et le substrat.
Designated States: AT, AU, BB, BG, BR, CA, CH, DE, DK, ES, FI, GB, HU, JP, KP, KR, LK, LU, MC, MG, MW, NL, NO, PL, RO, SD, SE, SU
European Patent Office (AT, BE, CH, DE, DK, ES, FR, GB, GR, IT, LU, NL, SE)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, ML, MR, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)
Also published as:
EP0527915AU1991078823