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1. (WO1991008329) APPARATUS FOR VAPOR-PHASE DIAMOND SYNTHESIS AND METHOD FOR VAPOR-PHASE DIAMOND SYNTHESIS
Latest bibliographic data on file with the International Bureau

Pub. No.: WO/1991/008329 International Application No.: PCT/JP1990/001545
Publication Date: 13.06.1991 International Filing Date: 28.11.1990
IPC:
C23C 16/27 (2006.01) ,C30B 25/02 (2006.01) ,C30B 25/10 (2006.01)
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
16
Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (CVD) processes
22
characterised by the deposition of inorganic material, other than metallic material
26
Deposition of carbon only
27
Diamond only
C CHEMISTRY; METALLURGY
30
CRYSTAL GROWTH
B
SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
25
Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour deposition growth
02
Epitaxial-layer growth
C CHEMISTRY; METALLURGY
30
CRYSTAL GROWTH
B
SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
25
Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour deposition growth
02
Epitaxial-layer growth
10
Heating of the reaction chamber or the substrate
Applicants:
SHOWA DENKO KABUSHIKI KAISHA [JP/JP]; 13-9, Shiba-daimon 1-chome Minato-ku Tokyo 105, JP (DE)
MURAKAWA, Masao [JP/JP]; JP
HIROSE, Yoichi [JP/JP]; JP
TAKEUCHI, Sadao [JP/JP]; JP (UsOnly)
KOMAKI, Kunio [JP/JP]; JP (UsOnly)
Inventors:
MURAKAWA, Masao; JP
HIROSE, Yoichi; JP
TAKEUCHI, Sadao; JP
KOMAKI, Kunio; JP
Agent:
FUKUDA, Takemichi ; Kashiwaya Bldg. 4F 6-13, Nishi-shinbashi 1-chome Minato-ku Tokyo 105, JP
Priority Data:
1/30661328.11.1989JP
2/23877707.09.1990JP
Title (EN) APPARATUS FOR VAPOR-PHASE DIAMOND SYNTHESIS AND METHOD FOR VAPOR-PHASE DIAMOND SYNTHESIS
(FR) APPAREIL ET PROCEDE DE SYNTHESE DU DIAMANT EN PHASE VAPEUR
Abstract:
(EN) An apparatus for burning-flame vapor-phase diamond synthesis, which is provided with a cover for covering burning flame, optionally having a gas inlet, around a burner. A method for vapor-phase diamond synthesis by using said apparatus, which comprises changing a relative parallel arrangement of burning flame with base material while forming burning flame for diamond synthesis.
(FR) L'appareil décrit, qui sert à effectuer la synthèse du diamant en phase vapeur avec une flamme ardente, comporte une hotte servant à recouvrir la flamme ardente, éventuellement avec un orifice d'entrée pour les gaz, autour d'un brûleur. Le procédé décrit, qui sert à effectuer la synthèse du diamant en phase vapeur grâce à l'utilisation d'un tel appareil, consiste à modifier un agencement relatif parallèle de la flamme ardente par rapport aux matériaux de base, pendant la formation de la flamme ardente utilisée pour la synthèse du diamant.
Designated States: DE, US
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)
Also published as:
US5273618