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1. (WO1991007683) SPECIMEN REVIEW STATION
Latest bibliographic data on file with the International Bureau

Pub. No.: WO/1991/007683 International Application No.: PCT/US1990/006338
Publication Date: 30.05.1991 International Filing Date: 31.10.1990
Chapter 2 Demand Filed: 05.04.1991
IPC:
G01N 21/88 (2006.01) ,H01L 21/00 (2006.01)
G PHYSICS
01
MEASURING; TESTING
N
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21
Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible, or ultra-violet light
84
Systems specially adapted for particular applications
88
Investigating the presence of flaws, defects or contamination
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21
Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Applicants:
INSYSTEMS, INC. [US/US]; 1120 Ringwood Court San Jose, CA 95131-1726, US
Inventors:
PAUL, David, C.; US
CAVAN, Daniel, L.; US
DODD, Brian, P.; US
GRAVES, Richard, E.; US
HOWE, Robert, B.; US
LAU, Robert, Shin-Shun; US
LIN, Lawrence, H.; US
Agent:
LEVINE, Michael, L.; Stoel Rives Boley Jones & Grey Suite 2300 900 Southwest Fifth Avenue Portland, OR 97204-1268, US
Priority Data:
433,75709.11.1989US
Title (EN) SPECIMEN REVIEW STATION
(FR) STATION DE CONTROLE DE SPECIMENS
Abstract:
(EN) A specimen review station (50) includes a vibration isolation table (64) that supports storage (80) and transportation (82, 84) equipments for a semiconductor wafer (54) and an optical system (58) for viewing microscopic regions of the patterned surface of the wafer. The optical system (58) includes an image extender (88) that enables an operator sitting on an adjustable chair (107) to view the wafer from a distance, thereby facilitating remote transportation and inspection of relatively large diameter wafers and reducing operator contamination of the wafer. An operator table (66) supports control equipments (96, 98, 100), which the operator uses to control the functions of the specimen review station. The vibration isolation table and the operator table are spatially isolated from each other in that they are connected only by the floor (70) that supports both of them. The vibration isolation table is, therefore, affected by neither floor vibrations resulting from normal building movement associated with manufacturing operations nor operator contact with the operator table.
(FR) Une station (50) de contrôle de spécimens comprend une table (64) d'isolement antivibratoire qui porte des équipements de stockage (80) et de transport (82, 84) d'une pastille semiconductrice (54) et un système optique (58) de visionnement de régions microscopiques de la surface imprimée de la pastille. Le système optique (58) comprend un amplificateur d'image (88) qui permet à un opérateur assis sur une chaise ajustable (107) de visionner la pastille à distance, ce qui facilite le transport et l'inspection à distance de pastilles de diamètre relativement important et de réduire la contamination de la pastille par l'opérateur. Une console (66) d'opérateur porte des équipements de commande (96, 98, 100) que l'opérateur utilise afin de commander les fonctions de la station de contrôle de spécimens. La table d'isolement antivibratoire et la console d'opérateur sont mutuellement isolées dans l'espace de sorte que la seule liaison entre les deux soit le plancher (70) qui les soutient toutes les deux. La table d'isolement antivibratoire n'est par conséquent affectée ni par des vibrations du plancher qui résultent de mouvements normaux du bâtiment associés aux opérations de fabrication ni par des contacts de l'opérateur avec la console.
Designated States: JP, KR
European Patent Office (AT, BE, CH, DE, DK, ES, FR, GB, GR, IT, LU, NL, SE)
Publication Language: English (EN)
Filing Language: English (EN)