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1. (WO1991006199) IMPROVED RESONANT RADIO FREQUENCY WAVE COUPLER APPARATUS USING HIGHER MODES
Latest bibliographic data on file with the International Bureau

Pub. No.: WO/1991/006199 International Application No.: PCT/US1990/005924
Publication Date: 02.05.1991 International Filing Date: 15.10.1990
IPC:
H01J 37/32 (2006.01) ,H05H 1/18 (2006.01) ,H05H 1/30 (2006.01)
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37
Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
32
Gas-filled discharge tubes
H ELECTRICITY
05
ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
H
PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY- CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
1
Generating plasma; Handling plasma
02
Arrangements for confining plasma by electric or magnetic fields; Arrangements for heating plasma
16
using applied electric and magnetic fields
18
wherein the fields oscillate at a very high frequency, e.g. in the microwave range
H ELECTRICITY
05
ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
H
PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY- CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
1
Generating plasma; Handling plasma
24
Generating plasma
26
Plasma torches
30
using applied electromagnetic fields, e.g. high-frequency or microwave energy
Applicants:
MICHIGAN STATE UNIVERSITY [US/US]; East Lansing, MI 48824, US
Inventors:
ASMUSSEN, Jes; US
HOPWOOD, Jeffrey, A.; US
Agent:
McLEOD, Ian, C.; 2190 Commons Parkway Okemos, MI 48864, US
Priority Data:
424,72020.10.1989US
Title (EN) IMPROVED RESONANT RADIO FREQUENCY WAVE COUPLER APPARATUS USING HIGHER MODES
(FR) APPAREIL RESONNANT DE COUPLAGE AMELIORE D'ONDES DE HAUTES FREQUENCES, UTILISANT DES MODES SUPERIEURS
Abstract:
(EN) An improved apparatus for generating a uniform electron cyclotron resonance (ECR) region in a plasma region (16) of a chamber (15) is described. The apparatus uses higher modes of electrical field cusps (16b) which are essentially perpendicular to the magnetic field cusps (16a) in a controlled manner to produce the ECR. The modes are optimal in the ECR region.
(FR) Appareil amélioré produisant une région de résonnance de cyclotron électronique (RCE) uniforme dans une région (16) de plasma d'une chambre (15). L'appareil utilise des modes supérieurs de points de rebroussement (16b) de champs électriques, lesquels sont perpendiculaires aux points de rebroussement (16a) de champs magnétiques, de manière régulée afin de produire la RCE. Les modes sont optimaux dans la région de RCE.
Designated States: JP
European Patent Office (AT, BE, CH, DE, DK, ES, FR, GB, GR, IT, LU, NL, SE)
Publication Language: English (EN)
Filing Language: English (EN)
Also published as:
EP0450061