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1. WO1991001044 - MOLDED ARTICLE FOR HOLDING WAFER

Publication Number WO/1991/001044
Publication Date 24.01.1991
International Application No. PCT/JP1990/000863
International Filing Date 04.07.1990
IPC
H01L 21/673 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
673using specially adapted carriers
H01L 21/68 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
68for positioning, orientation or alignment
CPC
H01L 21/67366
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; ; Apparatus not specifically provided for elsewhere
673using specially adapted carriers ; or holders; Fixing the workpieces on such carriers or holders
6735Closed carriers
67366characterised by materials, roughness, coatings or the like
H01L 21/6835
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; ; Apparatus not specifically provided for elsewhere
683for supporting or gripping
6835using temporarily an auxiliary support
Y10S 428/902
YSECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
10TECHNICAL SUBJECTS COVERED BY FORMER USPC
STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
428Stock material or miscellaneous articles
902High modulus filament or fiber
Y10S 428/931
YSECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
10TECHNICAL SUBJECTS COVERED BY FORMER USPC
STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
428Stock material or miscellaneous articles
922Static electricity metal bleed-off metallic stock
9265Special properties
931Components of differing electric conductivity
Y10T 428/1314
YSECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
10TECHNICAL SUBJECTS COVERED BY FORMER USPC
TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
428Stock material or miscellaneous articles
13Hollow or container type article [e.g., tube, vase, etc.]
131Glass, ceramic, or sintered, fused, fired, or calcined metal oxide or metal carbide containing [e.g., porcelain, brick, cement, etc.]
1314Contains fabric, fiber particle, or filament made of glass, ceramic, or sintered, fused, fired, or calcined metal oxide, or metal carbide or other inorganic compound [e.g., fiber glass, mineral fiber, sand, etc.]
Y10T 428/1372
YSECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
10TECHNICAL SUBJECTS COVERED BY FORMER USPC
TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
428Stock material or miscellaneous articles
13Hollow or container type article [e.g., tube, vase, etc.]
1352Polymer or resin containing [i.e., natural or synthetic]
1372Randomly noninterengaged or randomly contacting fibers, filaments, particles, or flakes
Applicants
  • OTSUKA KAGAKU KABUSHIKI KAISHA [JP/JP]; 2-27, Otedori 3-chome Chuo-ku Osaka-shi Osaka-fu 540, JP (AllExceptUS)
  • TABUCHI, Akira [JP/JP]; JP (UsOnly)
  • NAKAMURA, Morihiko [JP/JP]; JP (UsOnly)
Inventors
  • TABUCHI, Akira; JP
  • NAKAMURA, Morihiko; JP
Agents
  • TAMURA, Iwao; Tamura Patent Office Maru Building 2-8, Sonezaki 1-chome Kita-ku, Osaka-shi Osaka-fu 530, JP
Priority Data
1/17679507.07.1989JP
Publication Language Japanese (JA)
Filing Language Japanese (JA)
Designated States
Title
(EN) MOLDED ARTICLE FOR HOLDING WAFER
(FR) ARTICLE MOULE DE RETENUE DE TRANCHES
Abstract
(EN)
A molded article for holding a wafer, which is made of a thermoplastic resin reinforced with whiskers and used for handling a wafer and a glass sheet for a liquid crystal television set, such as a transfer basket, a storage case, a carrier jig, and the like. It is useful for washing, drying, moving or storing a semiconductor wafer free of contamination.
(FR)
Un article de retenue de tranches composé d'une résine thermoplastique renforcée par barbes, tel qu'une boîte de transfert, un coffret de stockage, un bac de transport et similaires, sert à manipuler une tranche et une vitre d'un poste récepteur de télévision à cristaux liquides. Il est utile pour laver, sécher, transporter ou stocker une tranche semiconductrice sans l'exposer à des comtaminations.
Also published as
Latest bibliographic data on file with the International Bureau