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1. WO1991000608 - SHAPE-MEMORY ALLOY MICRO-ACTUATOR

Publication Number WO/1991/000608
Publication Date 10.01.1991
International Application No. PCT/US1990/003659
International Filing Date 25.06.1990
Chapter 2 Demand Filed 08.01.1991
IPC
H01H 1/00 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
HELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
1Contacts
H01H 37/32 2006.01
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
HELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
37Thermally-actuated switches
02Details
32Thermally-sensitive members
CPC
F03G 7/065
FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
03MACHINES OR ENGINES FOR LIQUIDS; WIND, SPRING, OR WEIGHT MOTORS; PRODUCING MECHANICAL POWER OR A REACTIVE PROPULSIVE THRUST, NOT OTHERWISE PROVIDED FOR
GSPRING, WEIGHT, INERTIA OR LIKE MOTORS; MECHANICAL-POWER PRODUCING DEVICES OR MECHANISMS, NOT OTHERWISE PROVIDED FOR OR USING ENERGY SOURCES NOT OTHERWISE PROVIDED FOR
7Mechanical-power-producing mechanisms, not otherwise provided for or using energy sources not otherwise provided for
06using expansion or contraction of bodies due to heating, cooling, moistening, drying or the like
065using a shape memory element
F16F 2224/0258
FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
FSPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
2224Materials; Material properties
02solids
0258Shape-memory metals, e.g. Ni-Ti alloys
H01H 1/0036
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
HELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
1Contacts
0036Switches making use of microelectromechanical systems [MEMS] ;
H01H 2001/0042
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
HELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
1Contacts
0036Switches making use of microelectromechanical systems [MEMS] ;
0042Bistable switches, i.e. having two stable positions requiring only actuating energy for switching between them, e.g. with snap membrane or by permanent magnet
H01H 2037/008
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
HELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
37Thermally-actuated switches
008Micromechanical switches operated thermally
H01H 2061/0122
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
HELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
61Electrothermal relays
01Details
0107making use of shape memory materials
0122Two SMA actuators, e.g. one for closing or resetting contacts and one for opening them
Applicants
  • TINI ALLOY COMPANY [US/US]; 1144 - 65th Street Unit A Oakland, CA 94608, US
Inventors
  • BUSCH, John, Douglas; US
  • JOHNSON, Alfred, David; US
Agents
  • McCUBBREY, J., Bruce ; McCubbrey, Bartels, Meyer & Ward Suite 2700 One Post Office San Francisco, CA 94104-5231, US
Priority Data
373,03027.06.1989US
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) SHAPE-MEMORY ALLOY MICRO-ACTUATOR
(FR) MICROACTIONNEUR EN ALLIAGE A MEMOIRE DE FORME
Abstract
(EN)
A method of producing an integral piece of thermo-sensitive material, which is responsive to a shift in temperature from below to above a phase transformation temperature range to alter the material's condition to a shape-memory condition and move from one position to another. The method is characterized by depositing a thin film of shape-memory material (11 and 12), such as nickel titanium (Ni-Ti) onto a substrate (10) by vacuum deposition process such that the alloy exhibits an amorphous non-crystalline structure. The coated substrate is then annealed in a vacuum or in the presence of an inert atmosphere at a selected temperature, time and cool down rate to produce on ordered, partially disordered or fully disordered BCC structure. Also disclosed are actuator devices employing 'shape-memory material' (1) actuators.
(FR)
Méthode pour la réalisation d'une pièce intégrale de matière thermosensible, sensible à un changement de température entre une température en dessous d'une plage de température de transformation de phase à une température en-dessus de celle-ci, de manière à transformer l'état de ladite matière en un état de mémoire de forme et à changer d'une position à une autre. La méthode se caractérise en ce qu'une couche mince de matière à mémoire de forme (11 et 12), telle que le nickel titane (Ni-Ti), est déposée sur un substrat (10) par un procédé de déposition à vide de sorte que l'alliage présente une structure amorphe non cristalline. Le substrat ainsi revêtu est ensuite recuit dans un vide ou en présence d'une atmosphère inerte à une température, un temps et un taux de refroidissement choisis de manière à réaliser une structure BCC ordonnée, partiellement désordonnée, ou totalement désordonnée. On décrit également des dispositifs actionneurs utilisant des actionneurs en matière à mémoire de forme (1).
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